Remote Fluorination by Spillover of Atomic Fluorine

2018 ◽  
Vol 122 (46) ◽  
pp. 26372-26377 ◽  
Author(s):  
Norbert S. Chilingarov ◽  
Andrey Ya. Borschevsky ◽  
Boris V. Romanovsky ◽  
Lev N. Sidorov
Keyword(s):  
Atomic Fluorine

scholarly journals Formation of atomic fluorine anions in 12CaO·7Al2O3

AIP Advances ◽  
2021 ◽  
Vol 11 (1) ◽  
pp. 015146
Author(s):  
Navaratnarajah Kuganathan ◽  
Alexander Chroneos
Keyword(s):  
Atomic Fluorine

Studies about Flow Rate Effect on Atomic Fluorine Generation in Inductively Coupled CF4 Plasmas: A Global Model Investigation

2019 ◽  
Vol 31 (1) ◽  
pp. 125-134
Author(s):  
Rodrigo S. Pessoa ◽  
Sergio W. Parada ◽  
Mariana A. Fraga ◽  
Marisa Roberto ◽  
Homero S. Maciel ◽  
...  
Keyword(s):  
Flow Rate ◽  
Rate Effect ◽  
Global Model ◽  
Model Investigation ◽  
Inductively Coupled ◽  
Atomic Fluorine ◽  
Flow Rate Effect

scholarly journals Photoionization of atomic fluorine

2017 ◽  
Vol 875 ◽  
pp. 022005
Author(s):  
Jiayu Sun ◽  
Jinlei Liu ◽  
Jianhua Wu ◽  
Jianmin Yuan ◽  
Zengxiu Zhao
Keyword(s):  
Atomic Fluorine

Model for the dry etching of heavily dopedn‐type silicon by atomic fluorine in the absence of ion bombardment

1994 ◽  
Vol 75 (11) ◽  
pp. 7507-7513 ◽  
Author(s):  
Masahiko Kojima ◽  
Hisao Kato ◽  
Mitsuru Gatto
Keyword(s):  
Ion Bombardment ◽  
Dry Etching ◽  
Type Silicon ◽  
Atomic Fluorine

Production and transport chemistry of atomic fluorine in remote plasma source and cylindrical reaction chamber

2007 ◽  
Vol 40 (17) ◽  
pp. 5140-5154 ◽  
Author(s):  
S P Gangoli ◽  
A D Johnson ◽  
A A Fridman ◽  
R V Pearce ◽  
A F Gutsol ◽  
...  
Keyword(s):  
Plasma Source ◽  
Reaction Chamber ◽  
Remote Plasma ◽  
Atomic Fluorine

Changeover in the molecular and atomic fluorine laser transitions

2010 ◽  
Vol 49 (15) ◽  
pp. 2741 ◽  
Author(s):  
Hossein Mehravaran ◽  
Parviz Parvin ◽  
Davoud Dorranian
Keyword(s):  
Atomic Fluorine
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