Application of a trifluorocarbon ion (CF3+) primary ion source for depth profiling in secondary-ion mass spectrometry

1988 ◽  
Vol 60 (14) ◽  
pp. 1401-1404 ◽  
Author(s):  
Wilhad. Reuter ◽  
Gerald J. Scilla
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Ion Source ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Round-robin test for the measurement of layer thickness of multilayer films by secondary ion mass spectrometry depth profiling

2017 ◽  
Vol 49 (11) ◽  
pp. 1057-1063 ◽  
Author(s):  
Kyung Joong Kim ◽  
Jong Shik Jang ◽  
Joe Bennett ◽  
David Simons ◽  
Mario Barozzi ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Layer Thickness ◽  
Secondary Ion Mass Spectrometry ◽  
Depth Profiling ◽  
Multilayer Films ◽  
Round Robin ◽  
Round Robin Test ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

A test apparatus for secondary ion mass spectrometry

1983 ◽  
Vol 61 (4) ◽  
pp. 535-542 ◽  
Author(s):  
N. Klaus ◽  
J. D. Brown
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Low Cost ◽  
Ion Source ◽  
Channel Electron Multiplier ◽  
Electron Multiplier ◽  
Spherical Source ◽  
Ion Mass Spectrometry ◽  
Cylindrical Source ◽  
Secondary Ion

A low cost test device for secondary ion mass spectrometry (SIMS) components is described. It consists of a turbomolecular pumped vessel containing an insulated sample stage on an x−y manipulator, extraction optics, quadrupole mass filter, and channel electron multiplier. The construction and characteristics of a cylindrical and a spherical saddlefield ion source are described. The output of the cylindrical source is 10−4 A cm−2 whereas that of the spherical source is in the order of 10−3 A cm−2 at voltages up to 9 kV and at a beam divergence of 4°.

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