A test apparatus for secondary ion mass spectrometry

1983 ◽  
Vol 61 (4) ◽  
pp. 535-542 ◽  
Author(s):  
N. Klaus ◽  
J. D. Brown
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Low Cost ◽  
Ion Source ◽  
Channel Electron Multiplier ◽  
Electron Multiplier ◽  
Spherical Source ◽  
Ion Mass Spectrometry ◽  
Cylindrical Source ◽  
Secondary Ion

A low cost test device for secondary ion mass spectrometry (SIMS) components is described. It consists of a turbomolecular pumped vessel containing an insulated sample stage on an x−y manipulator, extraction optics, quadrupole mass filter, and channel electron multiplier. The construction and characteristics of a cylindrical and a spherical saddlefield ion source are described. The output of the cylindrical source is 10−4 A cm−2 whereas that of the spherical source is in the order of 10−3 A cm−2 at voltages up to 9 kV and at a beam divergence of 4°.

scholarly journals New Cs sputter ion source with polyatomic ion beams for secondary ion mass spectrometry applications

2007 ◽  
Vol 78 (8) ◽  
pp. 085101 ◽  
Author(s):  
S. F. Belykh ◽  
V. V. Palitsin ◽  
I. V. Veryovkin ◽  
A. P. Kovarsky ◽  
R. J. H. Chang ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beams ◽  
Ion Source ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Cesium liquid metal ion source for secondary ion mass spectrometry

1994 ◽  
Vol 65 (7) ◽  
pp. 2276-2280 ◽  
Author(s):  
Kaoru Umemura ◽  
Hiroyasu Shichi ◽  
Setsuo Nomura
Keyword(s):  
Mass Spectrometry ◽  
Liquid Metal ◽  
Metal Ion ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Source ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Secondary Ion Mass Spectrometry Studies of Polycrystalline Thin-Film Cdte/Cds Solar Cells

1990 ◽  
Vol 48 (2) ◽  
pp. 304-305
Author(s):  
S.E. Asher
Keyword(s):  
Thin Film ◽  
Mass Spectrometry ◽  
High Temperature ◽  
High Efficiency ◽  
Secondary Ion Mass Spectrometry ◽  
Spray Pyrolysis Technique ◽  
Low Cost ◽  
Large Area ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

Polycrystalline thin films of CdTe deposited on CdS are one of the most promising materials systems currently being investigated for the fabrication of low cost, large area, high efficiency photovoltaic devices. However, many of the deposition processes being used to fabricate these thin film materials have not yet been well characterized. It has been found that a post-fabrication heat-treatment is necessary to improve the quantum efficiency of these devices. Secondary ion mass spectrometry (SIMS) was used to study the interdiffusion of S and Te in CdTe/CdS structures grown by two different methods. The depth profiles revealed significant differences in the sputtering behavior depending on the film morphology.Two sets of CdTe/CdS samples were studied. The first set of films was deposited at high temperature using a spray pyrolysis technique with no post deposition anneal. The second set of films was electroplated, followed by treatment with CdCl2 and a high temperature anneal.

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