On the problem of filtered images in chemical analysis
As was proposed in several recent review papers (for instance 1-3) it is interesting to use electron energy losses corresponding to inner shell excitations by incident electrons to perform chemical analysis. One of the main advantages of the inner shell excitation spectroscopy (ISES) is that it is essentially available for light elements, contrary to characteristic X ray emission spectroscopy.Two methods can be used :- energy analysis : energy loss spectra are obtained from selected projected area of the sample and elemental characteristic energy losses are detected;- image energy filtering : images are formed by selecting electrons in an energy loss range which contains a characteristic energy loss. They show a map of the distribution of a given element in the object with a high spatial resolution.Combining these two methods is quite essential to perform chemical analysis. Such studies can be achieved in CTEM by means of an energy filtering system preserving the imaging properties of the microscope.