Applicability of self-consistent global model for characterization of inductively coupled Cl2 plasma

Vacuum ◽  
2007 ◽  
Vol 81 (5) ◽  
pp. 669-675 ◽  
Author(s):  
A.M. Efremov ◽  
Gwan-Ha Kim ◽  
Jong-Gyu Kim ◽  
A.V. Bogomolov ◽  
Chang-Il Kim
Keyword(s):  
Global Model ◽  
Inductively Coupled ◽  
Self Consistent

On the applicability of self-consistent global model for the characterization of Cl2/Ar inductively coupled plasma

2007 ◽  
Vol 84 (1) ◽  
pp. 136-143 ◽  
Author(s):  
A.M. Efremov ◽  
Gwan-Ha Kim ◽  
Jong-Gyu Kim ◽  
A.V. Bogomolov ◽  
Chang-Il Kim
Keyword(s):  
Inductively Coupled Plasma ◽  
Global Model ◽  
Inductively Coupled ◽  
Self Consistent

Global model analysis of Ar inductively coupled plasma driven by a 150 kHz-band high-power pulse burst

2019 ◽  
Vol 58 (SA) ◽  
pp. SAAB06
Author(s):  
Yuma Saito ◽  
Kodai Shibata ◽  
Katsuyuki Takahashi ◽  
Seiji Mukaigawa ◽  
Koichi Takaki ◽  
...  
Keyword(s):  
High Power ◽  
Inductively Coupled Plasma ◽  
Model Analysis ◽  
Global Model ◽  
Pulse Burst ◽  
Inductively Coupled ◽  
Power Pulse ◽  
High Power Pulse

scholarly journals Merits of microwave plasmas for optical emission spectrometry – characterization of an axially viewed microwave-sustained, inductively coupled, atmospheric-pressure plasma (MICAP)

2020 ◽  
Vol 35 (10) ◽  
pp. 2369-2377
Author(s):  
Helmar Wiltsche ◽  
Matthias Wolfgang
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Source ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Icp Oes ◽  
Microwave Plasmas ◽  
Inductively Coupled

The MICAP is a microwave driven plasma source employing nitrogen as the plasma gas. In this work we compare LODs and LOQs obtained in axial viewing with those obtained by ICP-OES and evaluate the effect of air instead of nitrogen as the plasma gas.

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