Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition
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2015 ◽
Vol 4
(9)
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pp. P398-P401
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2021 ◽
Vol 1762
(1)
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pp. 012041
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2003 ◽
Vol 52
(3)
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pp. 289
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2018 ◽
Vol 36
(6)
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pp. 06A104
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