Structural and morphological characterization of Al2O3 coated macro-porous silicon by atomic layer deposition

2016 ◽  
Vol 616 ◽  
pp. 628-634 ◽  
Author(s):  
Sridhar Sampath ◽  
Philipp Maydannik ◽  
Tatiana Ivanova ◽  
Tomáš Homola ◽  
Mika Sillanpää ◽  
...  
2021 ◽  
Vol 1762 (1) ◽  
pp. 012041
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K Buchkov ◽  
A Galluzzi ◽  
B Blagoev ◽  
A Paskaleva ◽  
P Terziyska ◽  
...  

2020 ◽  
Vol 694 ◽  
pp. 137740 ◽  
Author(s):  
Mostafa Afifi Hassan ◽  
Aadil Waseem ◽  
Muhammad Ali Johar ◽  
Sou Young Yu ◽  
June Key Lee ◽  
...  

2017 ◽  
Vol 46 (4) ◽  
pp. 1172-1178 ◽  
Author(s):  
T. Jurca ◽  
A. W. Peters ◽  
A. R. Mouat ◽  
O. K. Farha ◽  
J. T. Hupp ◽  
...  

The synthesis and characterization of molybdenum oxo-amidinate ALD precursors MoO2(R2AMD)2[AMD =N,N′-di-R-acetamidinate; R = Cy (2; cyclohexyl) andiPr (3)] is reported.


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