Effect of slurry components on chemical mechanical polishing of copper at low down pressure and a chemical kinetics model

2011 ◽  
Vol 520 (1) ◽  
pp. 400-403 ◽  
Author(s):  
Xiaoyan Liu ◽  
Yuling Liu ◽  
Yan Liang ◽  
Haixiao Liu ◽  
Zhiwen Zhao ◽  
...  
Keyword(s):  
Chemical Kinetics ◽  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Kinetics Model

A chemical kinetics model for a mixed-abrasive chemical mechanical polishing

2005 ◽  
Vol 483 (1-2) ◽  
pp. 239-244 ◽  
Author(s):  
Ping Hsun Chen ◽  
Bing Wei Huang ◽  
Han Chang Shih
Keyword(s):  
Chemical Kinetics ◽  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Kinetics Model

Surface Kinetics Model for SiLK Chemical Mechanical Polishing

2002 ◽  
Vol 149 (2) ◽  
pp. G118 ◽  
Author(s):  
Christopher L. Borst ◽  
Dipto G. Thakurta ◽  
William N. Gill ◽  
Ronald J. Gutmann
Keyword(s):  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Kinetics Model ◽  
Surface Kinetics

scholarly journals Kinematic Prediction and Experimental Demonstration of Conditioning Process for Controlling the Profile Shape of a Chemical Mechanical Polishing Pad

2021 ◽  
Vol 11 (10) ◽  
pp. 4358
Author(s):  
Hanchul Cho ◽  
Taekyung Lee ◽  
Doyeon Kim ◽  
Hyoungjae Kim
Keyword(s):  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Shape Error ◽  
Profile Shape ◽  
Conditioning Process ◽  
Polishing Pad ◽  
Simulation Based ◽  
Diamond Conditioner ◽  
Pad Conditioning ◽  
Good Agreement

The uniformity of the wafer in a chemical mechanical polishing (CMP) process is vital to the ultra-fine and high integration of semiconductor structures. In particular, the uniformity of the polishing pad corresponding to the tool directly affects the polishing uniformity and wafer shape. In this study, the profile shape of a CMP pad was predicted through a kinematic simulation based on the trajectory density of the diamond abrasives of the diamond conditioner disc. The kinematic prediction was found to be in good agreement with the experimentally measured pad profile shape. Based on this, the shape error of the pad could be maintained within 10 μm even after performing the pad conditioning process for more than 2 h, through the overhang of the conditioner.

scholarly journals Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

2021 ◽  
Author(s):  
Peili Gao ◽  
Tingting Liu ◽  
Zhenyu Zhang ◽  
Fanning Meng ◽  
Run-Ping Ye ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Ordered Mesoporous ◽  
Mesoporous Structures
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