Effect of the dielectric–substrate interface on charge accumulation from vacuum ultraviolet irradiation of low-k porous organosilicate dielectrics

2011 ◽  
Vol 519 (16) ◽  
pp. 5464-5466 ◽  
Author(s):  
H. Sinha ◽  
A. Sehgal ◽  
H. Ren ◽  
M.T. Nichols ◽  
M. Tomoyasu ◽  
...  
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Dielectric Substrate ◽  
Charge Accumulation ◽  
Substrate Interface ◽  
Low K

Surface potential due to charge accumulation during vacuum ultraviolet exposure for high-k and low-k dielectrics

2010 ◽  
Vol 97 (7) ◽  
pp. 072901 ◽  
Author(s):  
H. Ren ◽  
H. Sinha ◽  
A. Sehgal ◽  
M. T. Nichols ◽  
G. A. Antonelli ◽  
...  
Keyword(s):  
Surface Potential ◽  
Vacuum Ultraviolet ◽  
Charge Accumulation ◽  
Ultraviolet Exposure ◽  
High K ◽  
Low K

Effects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress

2015 ◽  
Vol 106 (1) ◽  
pp. 012904 ◽  
Author(s):  
X. Guo ◽  
S. W. King ◽  
H. Zheng ◽  
P. Xue ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Temperature Stress ◽  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Bias Temperature Stress ◽  
Low K

Effect of vacuum ultraviolet and ultraviolet Irradiation on capacitance-voltage characteristics of low-k-porous organosilicate dielectrics

2010 ◽  
Vol 96 (5) ◽  
pp. 052901 ◽  
Author(s):  
H. Sinha ◽  
J. L. Lauer ◽  
M. T. Nichols ◽  
G. A. Antonelli ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Capacitance Voltage ◽  
Low K

Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation

2014 ◽  
Vol 104 (6) ◽  
pp. 062904 ◽  
Author(s):  
H. Zheng ◽  
S. W. King ◽  
V. Ryan ◽  
Y. Nishi ◽  
J. L. Shohet
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Low K

Damage to low-k porous organosilicate glass from vacuum-ultraviolet irradiation

2011 ◽  
Author(s):  
J. L. Shohet ◽  
H. Sinha ◽  
H. Ren ◽  
M. T. Nichols ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Organosilicate Glass ◽  
Low K

Effect of vacuum-ultraviolet irradiation on the dielectric constant of low-k organosilicate dielectrics

2014 ◽  
Vol 105 (20) ◽  
pp. 202902 ◽  
Author(s):  
H. Zheng ◽  
E. T. Ryan ◽  
Y. Nishi ◽  
J. L. Shohet
Keyword(s):  
Dielectric Constant ◽  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Low K

Effects of vacuum ultraviolet irradiation on trapped charges and leakage currents of low-k organosilicate dielectrics

2015 ◽  
Vol 106 (19) ◽  
pp. 192905 ◽  
Author(s):  
H. Zheng ◽  
X. Guo ◽  
D. Pei ◽  
E. T. Ryan ◽  
Y. Nishi ◽  
...  
Keyword(s):  
Ultraviolet Irradiation ◽  
Vacuum Ultraviolet ◽  
Leakage Currents ◽  
Low K
Sign in / Sign up

Export Citation Format

Share Document