Structural changes in tungsten wire and their effect on the properties of hydrogenated nanocrystalline cubic silicon carbide thin films

2011 ◽  
Vol 519 (14) ◽  
pp. 4451-4454 ◽  
Author(s):  
Akimori Tabata ◽  
Akinori Naito
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Tungsten Wire ◽  
Structural Changes ◽  
Cubic Silicon Carbide

Advanced Thermal Processing of Semiconductor Materials by Flash Lamp Annealing

2004 ◽  
Vol 810 ◽  
Author(s):  
W. Skorupa ◽  
D. Panknin ◽  
M. Voelskow ◽  
W. Anwand ◽  
T. Gebel ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Thermal Processing ◽  
Flash Lamp ◽  
Semiconductor Materials ◽  
Great Promise ◽  
Heteroepitaxial Growth ◽  
Junction Formation ◽  
Cubic Silicon Carbide ◽  
Novel Devices

ABSTRACTThe use of flash lamp annealing for processing semiconductor materials is outlined. Specific applications include ultra-shallow junction formation and heteroepitaxial growth of improved quality thin films of cubic silicon carbide. It is demonstrated that flash lamp annealing holds great promise as a technique for fabricating novel devices.

Tensile mechanical behaviors of cubic silicon carbide thin films

2012 ◽  
Vol 62 ◽  
pp. 195-202 ◽  
Author(s):  
Wen-Xiu Wang ◽  
Li-Sha Niu ◽  
Yang-Yang Zhang ◽  
En-Qiang Lin
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Mechanical Behaviors ◽  
Cubic Silicon Carbide

Deposition of cubic silicon carbide thin films via thermal decomposition of methyltrichlorosilane in hydrogen

2005 ◽  
Vol 41 (3) ◽  
pp. 239-242 ◽  
Author(s):  
L. M. Ivanova ◽  
P. A. Aleksandrov ◽  
K. D. Demakov ◽  
V. A. Starostin ◽  
S. G. Shemardov
Keyword(s):  
Thin Films ◽  
Thermal Decomposition ◽  
Silicon Carbide ◽  
Cubic Silicon Carbide

Nanocrystalline cubic silicon carbide thin films for the window layer of solar cells deposited by hot wire CVD

2012 ◽  
Author(s):  
Himanshu S. Jha ◽  
M. Singh ◽  
Asha Yadav ◽  
. Lalhriatzuala ◽  
Dinesh Deva ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Solar Cells ◽  
Window Layer ◽  
Hot Wire ◽  
Cubic Silicon Carbide

Cubic Silicon Carbide Thin Films Deposition

2020 ◽  
pp. 149-154
Author(s):  
Matteo Bosi ◽  
Marco Negri ◽  
Giovanni Attolini
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Cubic Silicon Carbide
Sign in / Sign up

Export Citation Format

Share Document