Low Temperature Deposition of Hydrogenated Nanocrystalline Cubic Silicon Carbide Thin Films by HWCVD and VHF-PECVD

2006 ◽  
Author(s):  
Shinsuke Miyajima ◽  
Makoto Sawamura ◽  
Akira Yamada ◽  
Makoto Konagai
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Low Temperature ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Cubic Silicon Carbide

Low Temperature Deposition of Ge Thin Films for Phase Change Memory

2019 ◽  
Vol 11 (7) ◽  
pp. 269-278 ◽  
Author(s):  
Tianniu Chen ◽  
Chongying Xu ◽  
William Hunks ◽  
Matthias Stender ◽  
Gregory T. Stauf ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Phase Change ◽  
Phase Change Memory ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Change Memory

Low-temperature deposition of ZnO thin films on PET and glass substrates by DC-sputtering technique

2006 ◽  
Vol 496 (1) ◽  
pp. 112-116 ◽  
Author(s):  
A.N. Banerjee ◽  
C.K. Ghosh ◽  
K.K. Chattopadhyay ◽  
Hideki Minoura ◽  
Ajay K. Sarkar ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Zno Thin Films ◽  
Glass Substrates ◽  
Dc Sputtering ◽  
Low Temperature Deposition ◽  
Temperature Deposition ◽  
Dc Sputtering Technique
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