Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition

2011 ◽  
Vol 519 (15) ◽  
pp. 5082-5085 ◽  
Author(s):  
Mohd Ragib Badaruddin ◽  
Muhamad Rasat Muhamad ◽  
Saadah Abdul Rahman
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Hot Wire ◽  
Silicon Carbon ◽  
Multi Phase ◽  
Silicon Carbon Nitride

scholarly journals Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

2017 ◽  
Vol 17 (6) ◽  
pp. 306-314
Author(s):  
Paul Kouakou ◽  
Pamela Yoboue ◽  
Bafetigue Ouattara ◽  
Mohammed Belmahi ◽  
Jamal Bougdira
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Silicon Carbon ◽  
Silicon Carbon Nitride

Synthesis and characterization of carbon nitride thin films obtained by laser induced chemical vapour deposition

2000 ◽  
Vol 125 (1-3) ◽  
pp. 301-307 ◽  
Author(s):  
A. Crunteanu ◽  
M. Charbonnier ◽  
M. Romand ◽  
F. Vasiliu ◽  
D. Pantelica ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Synthesis And Characterization

Effects of rf power on the structural properties of carbon nitride thin films prepared by plasma enhanced chemical vapour deposition

2011 ◽  
Vol 519 (15) ◽  
pp. 4981-4986 ◽  
Author(s):  
Maisara Othman ◽  
Richard Ritikos ◽  
Noor Hamizah Khanis ◽  
Nur Maisarah Abdul Rashid ◽  
Saadah Abdul Rahman ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Rf Power

Electronic properties of silicon thin films prepared by hot-wire chemical vapour deposition

2000 ◽  
Vol 266-269 ◽  
pp. 258-262 ◽  
Author(s):  
R Brüggemann ◽  
J.P Kleider ◽  
C Longeaud ◽  
D Mencaraglia ◽  
J Guillet ◽  
...  
Keyword(s):  
Thin Films ◽  
Electronic Properties ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Hot Wire ◽  
Silicon Thin Films
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