scholarly journals Preliminary Synthesis of Carbon Nitride Thin Films by N2/CH4 Microwave Plasma Assisted Chemical Vapour Deposition: Characterisation of the Discharge and the Obtained Films

2007 ◽  
Vol 4 (S1) ◽  
pp. S210-S214 ◽  
Author(s):  
Paul Kouakou ◽  
Valérie Brien ◽  
Badreddine Assouar ◽  
Virginie Hody ◽  
Mohammed Belmahi ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour

scholarly journals Silicon Carbon Nitride Thin Films Deposited by Pulsed Microwave Plasma Assisted Chemical Vapour Deposition

2017 ◽  
Vol 17 (6) ◽  
pp. 306-314
Author(s):  
Paul Kouakou ◽  
Pamela Yoboue ◽  
Bafetigue Ouattara ◽  
Mohammed Belmahi ◽  
Jamal Bougdira
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Silicon Carbon ◽  
Silicon Carbon Nitride

Synthesis and characterization of carbon nitride thin films obtained by laser induced chemical vapour deposition

2000 ◽  
Vol 125 (1-3) ◽  
pp. 301-307 ◽  
Author(s):  
A. Crunteanu ◽  
M. Charbonnier ◽  
M. Romand ◽  
F. Vasiliu ◽  
D. Pantelica ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Carbon Nitride ◽  
Vapour Deposition ◽  
Chemical Vapour ◽  
Synthesis And Characterization

Role of silicon on the growth mechanisms of CNx and SiCN thin films by N2/CH4 microwave plasma assisted chemical vapour deposition

2008 ◽  
Vol 203 (3-4) ◽  
pp. 277-283 ◽  
Author(s):  
Paul Kouakou ◽  
Mohammed Belmahi ◽  
Valérie Brien ◽  
Virginie Hody ◽  
Henri-Noël Migeon ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapour Deposition ◽  
Vapour Deposition ◽  
Microwave Plasma ◽  
Chemical Vapour ◽  
Growth Mechanisms ◽  
Sicn Thin Films
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