Fabrication of p-type fin field-effect-transistors by solid-phase boron diffusion process using thin film doping sources
Keyword(s):
2014 ◽
Vol 23
(03n04)
◽
pp. 1450023
◽
Keyword(s):
Keyword(s):
Keyword(s):
2021 ◽
Keyword(s):
Keyword(s):