Small angle X-ray scattering measurements of porous low-k films using synchrotron radiation

2006 ◽  
Vol 515 (4) ◽  
pp. 2410-2414 ◽  
Author(s):  
Takashi Suzuki ◽  
Kazuhiko Omote ◽  
Yoshiyasu Ito ◽  
Ichiro Hirosawa ◽  
Yoshihiro Nakata ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Low K ◽  
Ray Scattering

scholarly journals Versatile wide angle diffraction setup for simultaneous wide and small angle x-ray scattering measurements with synchrotron radiation

2006 ◽  
Vol 77 (3) ◽  
pp. 033904 ◽  
Author(s):  
D. R. Rueda ◽  
M. C. García-Gutiérrez ◽  
A. Nogales ◽  
M. J. Capitán ◽  
T. A. Ezquerra ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Small Angle ◽  
Wide Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering

Small angle X-ray scattering measurements for supercritical fluid metals using synchrotron radiation

2002 ◽  
Vol 312-314 ◽  
pp. 269-273 ◽  
Author(s):  
Kozaburo Tamura ◽  
Masanori Inui ◽  
Tetsuya Matsusaka ◽  
Daisuke Ishikawa ◽  
Moynul Huq Kazi ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Supercritical Fluid ◽  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering

scholarly journals Small-angle X-ray scattering measurements of expanded fluid Se in the semiconductor–metal transition region using synchrotron radiation

2007 ◽  
Vol 40 (s1) ◽  
pp. s537-s539 ◽  
Author(s):  
Masanori Inui ◽  
Kazuhiro Matsuda ◽  
Kozaburo Tamura ◽  
Kohei Satoh ◽  
Atsushi Sobajima ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Transition Region ◽  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering

scholarly journals Precise and nondestructive characterization of a ‘buried’ nanostructure in a polymer thin film using synchrotron radiation ultra-small angle X-ray scattering

2012 ◽  
Vol 45 (3) ◽  
pp. 307-312 ◽  
Author(s):  
Takamichi Shinohara ◽  
Tomoko Shirahase ◽  
Daiki Murakami ◽  
Taiki Hoshino ◽  
Moriya Kikuchi ◽  
...  
Keyword(s):  
Thin Film ◽  
Synchrotron Radiation ◽  
Small Angle ◽  
Polymer Thin Film ◽  
X Ray ◽  
X Ray Scattering ◽  
Nondestructive Characterization ◽  
Ray Scattering

Small angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves

2007 ◽  
Vol 90 (19) ◽  
pp. 193122 ◽  
Author(s):  
Chengqing Wang ◽  
Ronald L. Jones ◽  
Eric K. Lin ◽  
Wen-Li Wu ◽  
Jim Leu
Keyword(s):  
Small Angle ◽  
Standing Waves ◽  
Sidewall Roughness ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering
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