Small angle x-ray scattering measurements of lithographic patterns with sidewall roughness from vertical standing waves

2007 ◽  
Vol 90 (19) ◽  
pp. 193122 ◽  
Author(s):  
Chengqing Wang ◽  
Ronald L. Jones ◽  
Eric K. Lin ◽  
Wen-Li Wu ◽  
Jim Leu
Keyword(s):  
Small Angle ◽  
Standing Waves ◽  
Sidewall Roughness ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering

Determination of a molecular shape for netrin-4 from hydrodynamic and small angle X-ray scattering measurements

2012 ◽  
Vol 31 (2) ◽  
pp. 135-140 ◽  
Author(s):  
Trushar R. Patel ◽  
Raphael Reuten ◽  
Shawn Xiong ◽  
Markus Meier ◽  
Donald J. Winzor ◽  
...  
Keyword(s):  
Small Angle ◽  
Molecular Shape ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering

Small-angle x-ray scattering measurements of the microstructure of liquid helium mixtures adsorbed in aerogel

2007 ◽  
Vol 76 (1) ◽  
Author(s):  
L. B. Lurio ◽  
N. Mulders ◽  
M. Paetkau ◽  
M. H. W. Chan ◽  
S. G. J. Mochrie
Keyword(s):  
Liquid Helium ◽  
Small Angle ◽  
Helium Mixtures ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering

Small angle X-ray scattering measurements of spatial dependent linewidth in dense nanoline gratings

2009 ◽  
Vol 517 (20) ◽  
pp. 5844-5847 ◽  
Author(s):  
Chengqing Wang ◽  
Wei-En Fu ◽  
Bin Li ◽  
Huai Huang ◽  
Christopher Soles ◽  
...  
Keyword(s):  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering

Investigation of the Structure of Cellulose in LiCl/DMAc Solution and Its Gelation Behavior by Small-Angle X-Ray Scattering Measurements

2006 ◽  
Vol 6 (4) ◽  
pp. 293-300 ◽  
Author(s):  
Daisuke Ishii ◽  
Daisuke Tatsumi ◽  
Takayoshi Matsumoto ◽  
Kazuki Murata ◽  
Hisao Hayashi ◽  
...  
Keyword(s):  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Gelation Behavior ◽  
Ray Scattering

scholarly journals Small angle X-ray scattering measurements for expanded fluid Se near the critical point

1999 ◽  
Vol 250-252 ◽  
pp. 531-536 ◽  
Author(s):  
M. Inui ◽  
Y. Oh'ishi ◽  
I. Nakaso ◽  
M.H. Kazi ◽  
K. Tamura
Keyword(s):  
Critical Point ◽  
Small Angle ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Measurements ◽  
Ray Scattering
Sign in / Sign up

Export Citation Format

Share Document