Structure and ferromagnetism of Mn+ ion-implanted ZnO thin films on sapphire

2006 ◽  
Vol 39 (1-4) ◽  
pp. 41-49 ◽  
Author(s):  
G. Brauer ◽  
W. Anwand ◽  
W. Skorupa ◽  
H. Schmidt ◽  
M. Diaconu ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Ion Implanted

Decrease in Work Function of Boron Ion-Implanted ZnO Thin Films

2007 ◽  
Vol 7 (11) ◽  
pp. 4021-4024 ◽  
Author(s):  
Gi-Seok Heo ◽  
Sang-Jin Hong ◽  
Jong-Woon Park ◽  
Bum-Ho Choi ◽  
Jong-Ho Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Work Function ◽  
Carrier Density ◽  
Carrier Mobility ◽  
Optical Transmittance ◽  
Zno Thin Films ◽  
Electrical And Optical Properties ◽  
Visible Wavelength Range ◽  
Ion Implanted

We have fabricated boron ion-implanted ZnO thin films by ion implantation into sputtered ZnO thin films on a glass substrate. An investigation of the effects of ion doses and activation time on the electrical and optical properties of the films has been made. The electrical sheet resistance and resistivity of the implanted films are observed to increase with increasing rapid thermal annealing (RTA)time, while decreasing as the ion dose increases. Without any RTA process, the variation of the carrier density is insensitive to the ion dose. With the RTA process, however, the carrier density of the implanted films increases and approaches that of the un-implanted ZnO film as the ion dose increases. On the other hand, the carrier mobility is shown to decrease with increasing ion doses when no RTA process is applied. With the RTA process, however, there is almost no change in the mobility. We have achieved the optical transmittance as high as 87% within the visible wavelength range up to 800 nm. It is also demonstrated that the work function can be engineered by changing the ion dose during the ion implantation process. We have found that the work function decreases as the ion dose increases.

Raman scattering investigation of hydrogen and nitrogen ion implanted ZnO thin films

2008 ◽  
Vol 8 (3-4) ◽  
pp. 291-294 ◽  
Author(s):  
J. Kennedy ◽  
B. Sundrakannan ◽  
R.S. Katiyar ◽  
A. Markwitz ◽  
Z. Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Raman Scattering ◽  
Zno Thin Films ◽  
Nitrogen Ion ◽  
Ion Implanted

Analysis of properties of Krypton ion implanted Zn-polar ZnO thin films

2021 ◽  
Author(s):  
Qingfen Jiang ◽  
Jie Lian ◽  
Minju Ying ◽  
Mingyang Wei ◽  
Chenlin Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Ion Implanted

Origin of magnetism in low energy Ni ion implanted ZnO thin films

2021 ◽  
pp. 130983
Author(s):  
Richa Bhardwaj ◽  
Amardeep Bharti ◽  
Baljeet Kaur ◽  
Manish Kumar ◽  
Asokan Kandasami ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Energy ◽  
Zno Thin Films ◽  
Ion Implanted

Fabrication of highly transparent Al-ion-implanted ZnO thin films by metal vapor vacuum arc method

2017 ◽  
Vol 56 (3) ◽  
pp. 031101 ◽  
Author(s):  
Han Lee ◽  
Kundan Sivashanmugan ◽  
Chi-Yuan Kao ◽  
Jiunn-Der Liao
Keyword(s):  
Thin Films ◽  
Metal Vapor ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Ion Implanted

scholarly journals Study on the p-type conductivities and Raman scattering properties of N+ ion-implanted O-rich ZnO thin films

2013 ◽  
Vol 62 (3) ◽  
pp. 037703
Author(s):  
Yang Tian-Yong ◽  
Kong Chun-Yang ◽  
Ruan Hai-Bo ◽  
Qin Guo-Ping ◽  
Li Wan-Jun ◽  
...  
Keyword(s):  
Thin Films ◽  
Raman Scattering ◽  
Zno Thin Films ◽  
P Type ◽  
Ion Implanted
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