scholarly journals Room temperature deposition of homogeneous, highly transparent and conductive Al-doped ZnO films by reactive high power impulse magnetron sputtering

2016 ◽  
Vol 157 ◽  
pp. 742-749 ◽  
Author(s):  
Martin Mickan ◽  
Ulf Helmersson ◽  
Hervé Rinnert ◽  
Jaafar Ghanbaja ◽  
Dominique Muller ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
High Power ◽  
Room Temperature ◽  
Zno Films ◽  
Temperature Deposition ◽  
Doped Zno

Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method

2009 ◽  
Vol 255 (11) ◽  
pp. 5669-5673 ◽  
Author(s):  
Weifeng Yang ◽  
Zhuguang Liu ◽  
Dong-Liang Peng ◽  
Feng Zhang ◽  
Huolin Huang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Room Temperature ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Transparent Conducting ◽  
Temperature Deposition ◽  
Doped Zno

Room-temperature ferromagnetism of Cu-doped ZnO films deposited by helicon magnetron sputtering

2009 ◽  
Vol 246 (6) ◽  
pp. 1243-1247 ◽  
Author(s):  
Fan-Yong Ran ◽  
Masao Imaoka ◽  
Masaki Tanemura ◽  
Yasuhiko Hayashi ◽  
Tun-Seng Herng ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Room Temperature ◽  
Room Temperature Ferromagnetism ◽  
Zno Films ◽  
Doped Zno

Room temperature DC magnetron sputtering deposition and field emission of Al-doped ZnO films

2011 ◽  
Vol 208 (8) ◽  
pp. 1908-1912 ◽  
Author(s):  
Fan Ye ◽  
Xing-Min Cai ◽  
Fu-Ping Dai ◽  
Dong-Ping Zhang ◽  
Ping Fan ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Field Emission ◽  
Room Temperature ◽  
Zno Films ◽  
Dc Magnetron Sputtering ◽  
Sputtering Deposition ◽  
Doped Zno

Optimization of sputtering parameters for deposition of Al-doped ZnO films by rf magnetron sputtering in Ar+H2 ambient at room temperature

2012 ◽  
Vol 520 (23) ◽  
pp. 6963-6969 ◽  
Author(s):  
B.L. Zhu ◽  
J. Wang ◽  
S.J. Zhu ◽  
J. Wu ◽  
D.W. Zeng ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Room Temperature ◽  
Rf Magnetron Sputtering ◽  
Zno Films ◽  
Doped Zno
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