Room temperature DC magnetron sputtering deposition and field emission of Al-doped ZnO films

Fan Ye; Xing-Min Cai; Fu-Ping Dai; Dong-Ping Zhang; Ping Fan; Li-Jun Liu

doi:10.1002/pssa.201127034

Room temperature DC magnetron sputtering deposition and field emission of Al-doped ZnO films

physica status solidi (a) ◽

10.1002/pssa.201127034 ◽

2011 ◽

Vol 208 (8) ◽

pp. 1908-1912 ◽

Cited By ~ 6

Author(s):

Fan Ye ◽

Xing-Min Cai ◽

Fu-Ping Dai ◽

Dong-Ping Zhang ◽

Ping Fan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Field Emission ◽

Room Temperature ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Sputtering Deposition ◽

Doped Zno

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The field emission of indium-doped ZnO films fabricated by room temperature DC magnetron sputtering

Physica B Condensed Matter ◽

10.1016/j.physb.2011.09.120 ◽

2012 ◽

Vol 407 (1) ◽

pp. 64-67 ◽

Cited By ~ 12

Author(s):

Fan Ye ◽

Xing-Min Cai ◽

Fu-Ping Dai ◽

Dong-Ping Zhang ◽

Ping Fan ◽

...

Keyword(s):

Magnetron Sputtering ◽

Field Emission ◽

Room Temperature ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Effect of Sputtering Pressure on Al-doped ZnO Films by DC Magnetron Sputtering

Journal of Inorganic Materials ◽

10.3724/sp.j.1077.2012.12213 ◽

2013 ◽

Vol 27 (10) ◽

pp. 1112-1116 ◽

Cited By ~ 2

Author(s):

Ke-Wei SUN ◽

Wan-Cheng ZHOU ◽

Shan-Shan HUANG ◽

Xiu-Feng TANG

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno ◽

Sputtering Pressure

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Process control for low temperature reactive deposition of Al doped ZnO films by ICP-assisted DC magnetron sputtering

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2005.02.207 ◽

2005 ◽

Vol 200 (1-4) ◽

pp. 862-866 ◽

Cited By ~ 15

Author(s):

S.J. Jung ◽

B.M. Koo ◽

Y.H. Han ◽

J.J. Lee ◽

J.H. Joo

Keyword(s):

Low Temperature ◽

Process Control ◽

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Reactive Deposition ◽

Doped Zno

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Effect of the substrate temperature on the properties of Ga-doped ZnO films for photovoltaic cell applications deposited by a pulsed DC magnetron sputtering with a rotating cylindrical target

Vacuum ◽

10.1016/j.vacuum.2012.03.002 ◽

2012 ◽

Vol 86 (10) ◽

pp. 1423-1427 ◽

Cited By ~ 17

Author(s):

Ji-Hyeon Park ◽

Beom-Ki Shin ◽

Hong-Man Moon ◽

Min-Jung Lee ◽

Kang-Il Park ◽

...

Keyword(s):

Magnetron Sputtering ◽

Substrate Temperature ◽

Photovoltaic Cell ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Pulsed Dc ◽

Cylindrical Target ◽

Doped Zno ◽

Pulsed Dc Magnetron Sputtering

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Room-temperature RF magnetron sputtering deposition of hydrogenated Ga-doped ZnO thin films on PET substrates for PDLC devices

Applied Physics A ◽

10.1007/s00339-018-2276-z ◽

2018 ◽

Vol 124 (12) ◽

Cited By ~ 2

Author(s):

Chaoting Zhu ◽

Tianqi Zhou ◽

Feng Shi ◽

Weijie Song ◽

Jia Li ◽

...

Keyword(s):

Thin Films ◽

Magnetron Sputtering ◽

Room Temperature ◽

Rf Magnetron Sputtering ◽

Zno Thin Films ◽

Sputtering Deposition ◽

Doped Zno

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Characterization of AI-doped ZnO Films Deposited by DC Magnetron Sputtering

Journal of the Korean institute of surface engineering ◽

10.5695/jkise.2007.40.3.107 ◽

2007 ◽

Vol 40 (3) ◽

pp. 107-112 ◽

Cited By ~ 3

Author(s):

Yi-Seop Park ◽

Seung-Ho Lee ◽

Pung-Keun Song

Keyword(s):

Magnetron Sputtering ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Room temperature ferromagnetism in Co-doped ZnO films synthesized by magnetron sputtering

High Power Laser and Particle Beams ◽

10.3788/hplpb20152702.24112 ◽

2015 ◽

Vol 27 (2) ◽

pp. 24112

Author(s):

吴兆丰 Wu Zhaofeng ◽

程鲲 Cheng Kun ◽

张峰 Zhang Feng

Keyword(s):

Magnetron Sputtering ◽

Room Temperature ◽

Room Temperature Ferromagnetism ◽

Zno Films ◽

Doped Zno ◽

Co Doped

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Effect of deposition time on the properties of Al doped ZnO films prepared by DC magnetron sputtering

10.1063/1.4980514 ◽

2017 ◽

Author(s):

Ganesh R. Bhand ◽

Nitu Motwani ◽

Nandu B. Chaure

Keyword(s):

Magnetron Sputtering ◽

Deposition Time ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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Room temperature DC magnetron sputtering deposition of hydrogenated aluminum doped zinc oxide thin films on polyethylene terephthalate substrates

Materials Letters ◽

10.1016/j.matlet.2013.05.063 ◽

2013 ◽

Vol 106 ◽

pp. 363-365 ◽

Cited By ~ 10

Author(s):

Ke Zhu ◽

Ye Yang ◽

Tiefeng Wei ◽

Ruiqin Tan ◽

Ping Cui ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Polyethylene Terephthalate ◽

Room Temperature ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Sputtering Deposition ◽

Aluminum Doped Zinc Oxide

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Effect of organic-buffer-layer on electrical property and environmental reliability of Ga-doped ZnO films prepared by RF plasma assisted DC magnetron sputtering on plastic substrate

Thin Solid Films ◽

10.1016/j.tsf.2010.08.158 ◽

2010 ◽

Vol 519 (5) ◽

pp. 1525-1529 ◽

Cited By ~ 4

Author(s):

Toshio Hinoki ◽

Chika Kyuhara ◽

Hideaki Agura ◽

Kenji Yazawa ◽

Kentaro Kinoshita ◽

...

Keyword(s):

Electrical Property ◽

Magnetron Sputtering ◽

Buffer Layer ◽

Plastic Substrate ◽

Rf Plasma ◽

Zno Films ◽

Dc Magnetron Sputtering ◽

Doped Zno

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