Effect of Sputtering Current on Structure and Morphology of (Ti1-xCrx)N Thin Films Deposited by Reactive Unbalanced Magnetron Co-sputtering
2006 ◽
Vol 36
(2a)
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pp. 332-335
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Keyword(s):
2019 ◽
Vol 359
◽
pp. 334-341
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2019 ◽
Vol 19
(3)
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pp. 1666-1669