Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films
2011 ◽
Vol 47
(9)
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pp. 1725-1735
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2006 ◽
Vol 36
(2a)
◽
pp. 332-335
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Keyword(s):
Keyword(s):
2005 ◽
Vol 283
(3-4)
◽
pp. 397-403
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