Digital moiré fringe measurement method for alignment in imprint lithography

2012 ◽  
Vol 44 (2) ◽  
pp. 446-451 ◽  
Author(s):  
Jinyou Shao ◽  
Yucheng Ding ◽  
Hongmiao Tian ◽  
Xin Li ◽  
Xiangming Li ◽  
...  
Keyword(s):  
Measurement Method ◽  
Imprint Lithography ◽  
Moire Fringe ◽  
Moiré Fringe ◽  
Digital Moiré

A digital moiré fringe method for displacement sensors

2016 ◽  
Vol 17 (9) ◽  
pp. 946-953 ◽  
Author(s):  
Jian Wu ◽  
Ting-ting Zhou ◽  
Bo Yuan ◽  
Li-qiang Wang
Keyword(s):  
Displacement Sensors ◽  
Moire Fringe ◽  
Moiré Fringe ◽  
Digital Moiré

Velocity measurement method based on single Moiré fringe

2015 ◽  
Vol 8 (6) ◽  
pp. 1044-1050 ◽  
Author(s):  
王亚洲 WANG Ya-zhou ◽  
万秋华 WAN Qiu-hua ◽  
杜颖财 DU Ying-cai ◽  
李俊峰 LI Jun-feng ◽  
卢新然 LU Xin-ran
Keyword(s):  
Velocity Measurement ◽  
Measurement Method ◽  
Moire Fringe ◽  
Moiré Fringe

Simulation and Contrast Analysis of tem Images of Cracks

1990 ◽  
Vol 48 (1) ◽  
pp. 578-579
Author(s):  
D. Goyal ◽  
A. H. King
Keyword(s):  
Displacement Vector ◽  
Crack Tip ◽  
Perfect Crystal ◽  
Operating Conditions ◽  
Displacement Fields ◽  
Fringe Contrast ◽  
Orthogonal Geometry ◽  
Moire Fringe ◽  
Moiré Fringe

TEM images of cracks have been found to give rise to a moiré fringe type of contrast. It is apparent that the moire fringe contrast is observed because of the presence of a fault in a perfect crystal, and is characteristic of the fault geometry and the diffracting conditions in the TEM. Various studies have reported that the moire fringe contrast observed due to the presence of a crack in an otherwise perfect crystal is distinctive of the mode of crack. This paper describes a technique to study the geometry and mode of the cracks by comparing the images they produce in the TEM because of the effect that their displacement fields have on the diffraction of electrons by the crystal (containing a crack) with the corresponding theoretical images. In order to formulate a means of matching experimental images with theoretical ones, displacement fields of dislocations present (if any) in the vicinity of the crack are not considered, only the effect of the displacement field of the crack is considered.The theoretical images are obtained using a computer program based on the two beam approximation of the dynamical theory of diffraction contrast for an imperfect crystal. The procedures for the determination of the various parameters involved in these computations have been well documented. There are three basic modes of crack. Preliminary studies were carried out considering the simplest form of crack geometries, i. e., mode I, II, III and the mixed modes, with orthogonal crack geometries. It was found that the contrast obtained from each mode is very distinct. The effect of variation of operating conditions such as diffracting vector (), the deviation parameter (ω), the electron beam direction () and the displacement vector were studied. It has been found that any small change in the above parameters can result in a drastic change in the contrast. The most important parameter for the matching of the theoretical and the experimental images was found to be the determination of the geometry of the crack under consideration. In order to be able to simulate the crack image shown in Figure 1, the crack geometry was modified from a orthogonal geometry to one with a crack tip inclined to the original crack front. The variation in the crack tip direction resulted in the variation of the displacement vector also. Figure 1 is a cross-sectional micrograph of a silicon wafer with a chromium film on top, showing a crack in the silicon.

An automatic high-speed scanner for moiré fringe techniques

1972 ◽  
Vol 7 (2) ◽  
pp. 151-156 ◽  
Author(s):  
D J Hitchings ◽  
A R Luxmoore
Keyword(s):  
High Speed ◽  
Peak Detection ◽  
Optical Signal ◽  
Single Line ◽  
Scanning System ◽  
Moiré Fringes ◽  
Moire Fringe ◽  
Scanning Line ◽  
Moiré Fringe

A high-speed scanning system has been developed to locate the centres of moiré fringes along any single line. The system comprises a rotating-mirror scanner for conversion of an optical signal to electrical; this conversion is followed by peak detection, storage, and print-out electronics. Up to 20 fringes can be scanned in 1 ms. The results are printed in terms of fringe separations along the scanning line.

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