Alignment measurement method for imprint lithography using moiré fringe pattern

2008 ◽  
Vol 47 (11) ◽  
pp. 113604 ◽  
Author(s):  
Jinyou Shao
Keyword(s):  
Measurement Method ◽  
Fringe Pattern ◽  
Imprint Lithography ◽  
Moire Fringe ◽  
Moiré Fringe

Digital moiré fringe measurement method for alignment in imprint lithography

2012 ◽  
Vol 44 (2) ◽  
pp. 446-451 ◽  
Author(s):  
Jinyou Shao ◽  
Yucheng Ding ◽  
Hongmiao Tian ◽  
Xin Li ◽  
Xiangming Li ◽  
...  
Keyword(s):  
Measurement Method ◽  
Imprint Lithography ◽  
Moire Fringe ◽  
Moiré Fringe ◽  
Digital Moiré

Binarization of scanning Moiré fringe pattern

1988 ◽  
Vol 8 (3-4) ◽  
pp. 263-275 ◽  
Author(s):  
Y. Arai ◽  
T. Kurata
Keyword(s):  
Fringe Pattern ◽  
Moire Fringe ◽  
Moiré Fringe

Velocity measurement method based on single Moiré fringe

2015 ◽  
Vol 8 (6) ◽  
pp. 1044-1050 ◽  
Author(s):  
王亚洲 WANG Ya-zhou ◽  
万秋华 WAN Qiu-hua ◽  
杜颖财 DU Ying-cai ◽  
李俊峰 LI Jun-feng ◽  
卢新然 LU Xin-ran
Keyword(s):  
Velocity Measurement ◽  
Measurement Method ◽  
Moire Fringe ◽  
Moiré Fringe

Demodulation of Phase Shift Shadow Moiré Fringe Pattern by Orthonormalzing Method

2017 ◽  
Vol 46 (7) ◽  
pp. 712002
Author(s):  
杜虎兵 DU Hu-bing ◽  
颜菁菁 YAN Jing-jing
Keyword(s):  
Phase Shift ◽  
Fringe Pattern ◽  
Shadow Moire ◽  
Shadow Moiré ◽  
Moire Fringe ◽  
Moiré Fringe
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