Optical surface profile measurement using phase retrieval by tuning the illumination wavelength

2012 ◽  
Vol 285 (24) ◽  
pp. 5029-5036 ◽  
Author(s):  
Peng Bao ◽  
Giancarlo Pedrini ◽  
Wolfgang Osten
Keyword(s):  
Phase Retrieval ◽  
Surface Profile ◽  
Profile Measurement ◽  
Optical Surface ◽  
Illumination Wavelength ◽  
Surface Profile Measurement

On-Machine Optical Surface Profile Measuring System for Nano-Machining

2011 ◽  
Vol 5 (3) ◽  
pp. 369-376 ◽  
Author(s):  
Hiroshi Sawano ◽  
◽  
Motohiro Takahashi ◽  
Hayato Yoshioka ◽  
Hidenori Shinno ◽  
...  
Keyword(s):  
Error Detection ◽  
Machine Surface ◽  
Detection Method ◽  
Surface Profile ◽  
Optical Probe ◽  
Measuring System ◽  
Profile Measurement ◽  
Optical Surface ◽  
Increasing Demand ◽  
Surface Profile Measurement

There has been an increasing demand for machining of precision parts recently. In order to meet such requirements, nano-machining systems with on-machine surface profile measuring function are required. This paper presents a newly developed on-machine shape measuring system with an optical probe. In this system, an astigmatic focus error detection method is applied to the optical probe. In addition, the influence of the uneven reflection from the surface can be reduced by using two quadrant photodiodes. The results of surface profile measurement confirm that the system developed provides a resolution of 1 nm scale and a repeatability of approximately 50 nm.

Development of Phase-retrieval measuring System for 3D Micromachined Surface Profile Measurement

2002 ◽  
Vol 2002.5 (0) ◽  
pp. 289-290
Author(s):  
Yasuhiro TAKAYA ◽  
Atsushi TAGUCHI ◽  
Satoru TAKAHASHI ◽  
Takashi MIYOSHI
Keyword(s):  
Phase Retrieval ◽  
Surface Profile ◽  
Measuring System ◽  
Profile Measurement ◽  
Surface Profile Measurement
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