Spherical aberration correction system using an adaptive optics deformable mirror

2006 ◽  
Vol 263 (2) ◽  
pp. 147-151 ◽  
Author(s):  
M. Schwertner ◽  
M.J. Booth ◽  
T. Tanaka ◽  
T. Wilson ◽  
S. Kawata
Keyword(s):  
Adaptive Optics ◽  
Spherical Aberration ◽  
Deformable Mirror ◽  
Aberration Correction ◽  
Correction System

Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

2012 ◽  
Vol 52 (9-10) ◽  
pp. 2120-2122 ◽  
Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C.R. Stockbridge ◽  
A. Yurt ◽  
F.H. Köklü ◽  
...  
Keyword(s):  
Spherical Aberration ◽  
Deformable Mirror ◽  
Aberration Correction ◽  
Solid Immersion Lens

Spherical Aberration Correction in Aplanatic Solid Immersion Imaging with Adaptive Optics

2012 ◽  
Author(s):  
Yang Lu ◽  
Euan Ramsay ◽  
Christopher R. Stockbridge ◽  
Abdulkadir Yurt ◽  
M. Selim Ünlü ◽  
...  
Keyword(s):  
Adaptive Optics ◽  
Spherical Aberration ◽  
Aberration Correction

Closer to the Theoretical Limit: Spherical Corrections to Aplanatic Solid Immersion Imaging with Adaptive Optics

2012 ◽  
Author(s):  
Y. Lu ◽  
E. Ramsay ◽  
C.R. Stockbridge ◽  
A. Yurt ◽  
F. H. Köklü ◽  
...  
Keyword(s):  
Refractive Index ◽  
Adaptive Optics ◽  
Spherical Aberration ◽  
Deformable Mirror ◽  
Substrate Thickness ◽  
Spot Intensity ◽  
Theoretical Limit ◽  
Thickness Tolerance ◽  
Theory And Experiment ◽  
Good Agreement

Abstract Aplanatic solid immersion lens (SIL) microscopy is required to achieve the highest possible resolution for next generation silicon IC backside inspection and failure analysis. However, aplanatic SILs are susceptible to spherical aberration introduced by substrate thickness mismatch. We have developed a wavefront precompensation technique using a MEMS deformable mirror and demonstrated an increase in substrate thickness tolerance in aplanatic SIL imaging. Good agreement between theory and experiment is achieved and spot intensity increases by at least a factor of two to three are demonstrated for thicknesses deviating several percent from ideal. This technique is also capable of fixing aberrations due to SIL fabrication, off-axis imaging and refractive index mismatch.

scholarly journals Adaptive optics via pupil ring segmentation improves spherical aberration correction for two-photon imaging of optically cleared tissues

2020 ◽  
Vol 28 (23) ◽  
pp. 34935
Author(s):  
Yufeng Gao ◽  
Lina Liu ◽  
Yixuan Yin ◽  
Jiuling Liao ◽  
Jia Yu ◽  
...  
Keyword(s):  
Adaptive Optics ◽  
Spherical Aberration ◽  
Aberration Correction ◽  
Two Photon ◽  
Photon Imaging ◽  
Two Photon Imaging

Enhancement of Laser Trapping Force by Spherical Aberration Correction Using a Deformable Mirror

2003 ◽  
Vol 42 (Part 2, No. 6B) ◽  
pp. L701-L703 ◽  
Author(s):  
Taisuke Ota ◽  
Tadao Sugiura ◽  
Satoshi Kawata ◽  
Martin J. Booth ◽  
Mark A. A. Neil ◽  
...  
Keyword(s):  
Spherical Aberration ◽  
Deformable Mirror ◽  
Aberration Correction ◽  
Laser Trapping ◽  
Trapping Force
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