Development of an electrostatic beam focus lens equipped with electron suppression grids for a microwave ion source to inject high-current ion beams into a linac

2005 ◽  
Vol 550 (1-2) ◽  
pp. 74-81 ◽  
Author(s):  
M. Tanaka ◽  
S. Hara ◽  
T. Hae ◽  
T. Iga ◽  
T. Norimine
Keyword(s):  
Ion Beams ◽  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

Off-resonance microwave ion source for high-current molecular ion-beams

2005 ◽  
Vol 237 (1-2) ◽  
pp. 428-432 ◽  
Author(s):  
N. Sakudo ◽  
N. Ikenaga ◽  
R. Nishimoto ◽  
Y. Tamashiro ◽  
T. Shinohara ◽  
...  
Keyword(s):  
Ion Beams ◽  
Ion Source ◽  
High Current ◽  
Molecular Ion ◽  
Microwave Ion Source ◽  
Resonance Microwave

Investigations on ion beams from a high-current ion source

1997 ◽  
Vol 46 (2) ◽  
pp. 588-591 ◽  
Author(s):  
D. Ratschko ◽  
B.G. Zhou ◽  
D. Knolle ◽  
M. Glaser
Keyword(s):  
Ion Beams ◽  
Ion Source ◽  
High Current

Minipermanent magnet high-current microwave ion source

2006 ◽  
Vol 77 (3) ◽  
pp. 03A305 ◽  
Author(s):  
Zhizhong Song ◽  
Shixiang Peng ◽  
Jinxiang Yu ◽  
Jianchuan Ming ◽  
Zhongxi Yuan ◽  
...  
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source

scholarly journals Characteristics of a High Current Microwave Ion Source for Oxygen Ion Implanter.

Shinku ◽  
1999 ◽  
Vol 42 (7) ◽  
pp. 670-675 ◽  
Author(s):  
Takayoshi SEKI ◽  
Katsumi TOKIGUCHI
Keyword(s):  
Ion Source ◽  
High Current ◽  
Oxygen Ion ◽  
Microwave Ion Source

Measurement of excess energies of ion beams extracted from a microwave ion source

1998 ◽  
Vol 136-138 ◽  
pp. 793-797 ◽  
Author(s):  
N. Sakudo ◽  
K. Hayashi ◽  
J. Yokota ◽  
A. Kawasaki ◽  
N. Ikenaga ◽  
...  
Keyword(s):  
Ion Beams ◽  
Ion Source ◽  
Microwave Ion Source

Ion species measurement of high current metal ion beams extracted from a multicusp ion source

1992 ◽  
Vol 63 (4) ◽  
pp. 2481-2483 ◽  
Author(s):  
Yasuhiro Matsuda ◽  
Hiroshi Inami ◽  
Takatoshi Yamashita ◽  
Shuichi Fujiwara ◽  
Yutaka Inouchi ◽  
...  
Keyword(s):  
Metal Ion ◽  
Ion Beams ◽  
Ion Source ◽  
High Current ◽  
Multicusp Ion Source ◽  
Ion Species

High‐current ion implanter using a microwave ion source

1983 ◽  
Vol 54 (6) ◽  
pp. 681-684 ◽  
Author(s):  
Noriyuki Sakudo ◽  
Katsumi Tokiguchi ◽  
Hidemi Koike ◽  
Ichiro Kanomata
Keyword(s):  
Ion Source ◽  
High Current ◽  
Microwave Ion Source
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