Influence of temperature on the actuation voltage of RF-MEMS switches

2013 ◽  
Vol 53 (5) ◽  
pp. 706-711 ◽  
Author(s):  
V. Mulloni ◽  
F. Solazzi ◽  
F. Ficorella ◽  
A. Collini ◽  
B. Margesin
Keyword(s):  
Rf Mems ◽  
Actuation Voltage ◽  
Influence Of Temperature ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Influence Of Temperature On

The Influence of Ambient Pressure on the Dynamic Response of RF MEMS Switches

2010 ◽  
Author(s):  
Avihay Ohana ◽  
Oren Aharon ◽  
Ronen Maimon ◽  
Boris Nepomnyashchy ◽  
Lior Kogut
Keyword(s):  
Rf Mems ◽  
Ambient Pressure ◽  
Actuation Voltage ◽  
Operating Conditions ◽  
Experimental Results ◽  
Release Time ◽  
Q Factor ◽  
Optimal Operating ◽  
Mems Switches ◽  
Rf Mems Switches

A study of the dynamic behavior of an RF MEMS switch is presented at different operating conditions. Experimental results for the actuation and release time and Q-factor as a function of the ambient pressure and actuation voltage are compared to theoretical predictions based on existing model. Optimal operating conditions (ambient pressure and actuation voltage) are determined based on two criterions: minimal actuation and release time and minimal oscillations upon switch release. In light of the experimental results optimal operating conditions determined to be 1.4Vpi at a pressure of a few torrs where actuation and release time are equal and short enough with no release oscillations. Three pressure regimes are identified with characteristic behavior of the Q-factor and actuation and release time in each regime. These behaviors have significant implications in many MEMS devices, especially RF MEMS switches.

Design of H-shaped low actuation-voltage RF-MEMS switches

2006 ◽  
Author(s):  
Anatoliy Batmanov ◽  
Ehab K. I. Hamad ◽  
Edmund P. Burte ◽  
Abbas S. Omar
Keyword(s):  
Rf Mems ◽  
Actuation Voltage ◽  
Mems Switches ◽  
Rf Mems Switches

ON ELECTROMECHANICAL PERFORMANCE OF LOW ACTUATION VOLTAGE RF MEMS SWITCHES

2005 ◽  
Author(s):  
K. J RANGRA ◽  
L. LORENZELLI ◽  
C. COLLINI ◽  
B. MARGESIN ◽  
F. GIACOMOZZI ◽  
...  
Keyword(s):  
Rf Mems ◽  
Actuation Voltage ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Electromechanical Performance

scholarly journals Laterally Movable Triple Electrodes Actuator toward Low Voltage and Fast Response RF-MEMS Switches

Sensors ◽  
2019 ◽  
Vol 19 (4) ◽  
pp. 864 ◽  
Author(s):  
Yasuyuki Naito ◽  
Kunihiko Nakamura ◽  
Keisuke Uenishi
Keyword(s):  
Rf Mems ◽  
Low Voltage ◽  
Low Cost ◽  
Actuation Voltage ◽  
Fast Response ◽  
Point Of View ◽  
Micro Electro Mechanical Systems ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Series Switch

A novel actuator toward a low voltage actuation and fast response in RF-MEMS (radio frequency micro-electro-mechanical systems) switches is reported in this paper. The switch is comprised of laterally movable triple electrodes, which are bistable by electrostatic forces applied for not only the on-state, but also the off-state. The bistable triple electrodes enable the implementation of capacitive series and shunt type switches on a single switch, which leads to high isolation in spite of the small gap between the electrodes on the series switch. These features of the actuator are effective for a low voltage and fast response actuation in both the on- and off-state. The structure was designed in RF from a mechanical point of view. The laterally movable electrodes were achieved using a simple, low-cost two-mask process with 2.0 µm thick sputtered aluminum. The characteristics of switching response time and actuation voltage were 5.0 µs and 9.0 V, respectively.

Modeling and Validation of Capacitive Type RF MEMS Switches for Low Actuation Voltage and High Isolation

2018 ◽  
Author(s):  
Suhas S. Mohite ◽  
Mukesh Madhewar ◽  
Vishram B. Sawant
Keyword(s):  
High Frequency ◽  
Rf Mems ◽  
Actuation Voltage ◽  
Mems Switches ◽  
High Isolation ◽  
Rf Mems Switches ◽  
Optimum Geometry ◽  
Mechanical Resonant Frequency ◽  
Structural Configurations ◽  
Insertion Losses

Design objectives in capacitive type radio frequency micro electro mechanical switches (RF-MEMS) are to reduce actuation voltages and to obtain low insertion losses with high isolation. In this study, we report design, modeling and simulation of three new structural configurations using ANSYS to obtain the optimum geometry; further high frequency simulations are performed using HFSS to obtain low insertion losses and high isolation. The designed switches require only 3.9 to 5 V as pull-in voltage for actuation. The mechanical resonant frequency and quality factor are in the range of 6.5 to 8.7 kHz and 1.1 to 1.2, respectively. Switching times for all the designs are 32 to 38 μs at their respective pull-in voltages. Two of the switch designs have insertion loss of less than 0.25 to 0.8 dB at 60 and 50 GHz, and isolation greater than 58 dB for all three designs.

The Effect of Dielectric Charging on Capacitive MEMS Switch

2014 ◽  
Vol 511-512 ◽  
pp. 732-736
Author(s):  
Qin Wen Huang ◽  
Xiang Guang Li ◽  
Yun Hui Wang ◽  
Yu Bin Jia
Keyword(s):  
Rf Mems ◽  
Actuation Voltage ◽  
Deposition Process ◽  
Dielectric Surface ◽  
One Dimensional ◽  
Mems Switches ◽  
Dielectric Charging ◽  
Mems Switch ◽  
Rf Mems Switches ◽  
Capacitive Mems

Based on a one-dimensional model of dielectric charging for capacitive RF MEMS switches, the accumulated charge density and actuation voltage shift were simulated. The results illustrate that rougher surface can reduce dielectric charging, so the dielectric layer should be fabricated much rougher during deposition process. But the capacitance ratio of switch will be decreased with rougher surface, which can cause a reduction of switch performance. Thus the dielectric surface roughness should be balanced in reliability and isolation.

Analytical Energy Model for the Dynamic Behavior of RF MEMS Switches Under Increased Actuation Voltage

2014 ◽  
Vol 23 (6) ◽  
pp. 1428-1439 ◽  
Author(s):  
Jasmina Casals-Terre ◽  
Marco A. Llamas ◽  
David Girbau ◽  
Lluis Pradell ◽  
Antonio Lazaro ◽  
...  
Keyword(s):  
Dynamic Behavior ◽  
Rf Mems ◽  
Actuation Voltage ◽  
Energy Model ◽  
Mems Switches ◽  
Rf Mems Switches
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