Design, modeling and analysis of highly reliable capacitive microaccelerometer based on circular stepped-plate and small-area touch mode

Kai Li; Wenyuan Chen; Weiping Zhang

doi:10.1016/j.microrel.2012.02.009

Design, modeling and analysis of highly reliable capacitive microaccelerometer based on circular stepped-plate and small-area touch mode

Microelectronics Reliability ◽

10.1016/j.microrel.2012.02.009 ◽

2012 ◽

Vol 52 (7) ◽

pp. 1373-1381 ◽

Cited By ~ 3

Author(s):

Kai Li ◽

Wenyuan Chen ◽

Weiping Zhang

Keyword(s):

Small Area ◽

Modeling And Analysis ◽

Capacitive Microaccelerometer

Download Full-text

Small Area Modeling of the Industrial Sector (SAMIS): An Integrated Econometric—Interindustry Approach

Environment and Planning A Economy and Space ◽

10.1068/a200655 ◽

1988 ◽

Vol 20 (5) ◽

pp. 655-668 ◽

Cited By ~ 18

Author(s):

K Moghadam ◽

K P Ballard

Keyword(s):

Small Area ◽

Industrial Sector ◽

Input Output ◽

New Approach ◽

Modeling And Analysis ◽

Modeling Methodology ◽

Manufacturing Sectors ◽

New Type ◽

Model Equations ◽

Econometric Technique

Industry modeling and analysis are vital to regional policymaking. However, the most effective empirical techniques—econometric and input—output—often produce contrary results. This paper is a summary of a new modeling methodology that attempts a reconciliation. Called I-SAMIS, the new approach integrates the flexibility and macro-orientation features of the time-series econometric technique together with the interindustry sensitivity of input—output. Two sections of the paper discuss the new modeling approach and detail the linking mechanism. A model of this new type has been constructed for northern California. This application is discussed in the next two sections. Model equations for nineteen manufacturing sectors, performance and forecasting comparisons are presented.

Download Full-text

Rocking Beam Microarea Diffraction Applied to Metallic thin Films

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100091962 ◽

1976 ◽

Vol 34 ◽

pp. 396-397

Author(s):

R. H. Geiss

Keyword(s):

Thin Films ◽

Electron Diffraction ◽

Small Area ◽

Objective Lens ◽

Electron Optics ◽

Metallic Thin Films ◽

Transmission Electron Diffraction ◽

Transmission Electron ◽

Sample Height ◽

Scanning Transmission

The theory and practical limitations of micro area scanning transmission electron diffraction (MASTED) will be presented. It has been demonstrated that MASTED patterns of metallic thin films from areas as small as 30 Åin diameter may be obtained with the standard STEM unit available for the Philips 301 TEM. The key to the successful application of MASTED to very small area diffraction is the proper use of the electron optics of the STEM unit. First the objective lens current must be adjusted such that the image of the C2 aperture is quasi-stationary under the action of the rocking beam (obtained with 40-80-160 SEM settings of the P301). Second, the sample must be elevated to coincide with the C2 aperture image and its image also be quasi-stationary. This sample height adjustment must be entirely mechanical after the objective lens current has been fixed in the first step.

Download Full-text