Plasma-enhanced flexible metal–insulator–metal capacitor using high-k ZrO2 film as gate dielectric with improved reliability

2010 ◽  
Vol 50 (8) ◽  
pp. 1098-1102 ◽  
Author(s):  
Min-Ching Chu ◽  
Jagan Singh Meena ◽  
Chih-Chia Cheng ◽  
Hsin-Chiang You ◽  
Feng-Chih Chang ◽  
...  
Keyword(s):  
Gate Dielectric ◽  
Metal Insulator ◽  
Zro2 Film ◽  
High K ◽  
Metal Insulator Metal ◽  
Flexible Metal

Flexible metal–insulator–metal capacitor using plasma enhanced binary hafnium–zirconium–oxide as gate dielectric layer

2010 ◽  
Vol 50 (5) ◽  
pp. 652-656 ◽  
Author(s):  
Jagan Singh Meena ◽  
Min-Ching Chu ◽  
Jitendra N. Tiwari ◽  
Hsin-Chiang You ◽  
Chung-Hsin Wu ◽  
...  
Keyword(s):  
Dielectric Layer ◽  
Zirconium Oxide ◽  
Gate Dielectric ◽  
Metal Insulator ◽  
Metal Insulator Metal ◽  
Flexible Metal

Flexible metal–insulator–metal (MIM) devices for plastic film AM-LCD

2002 ◽  
Vol 2 (3) ◽  
pp. 245-248 ◽  
Author(s):  
Sung-Jei Hong ◽  
Chan-Jae Lee ◽  
Jeong-In Han ◽  
Won-Keun Kim ◽  
Dae-Gyu Moon ◽  
...  
Keyword(s):  
Plastic Film ◽  
Metal Insulator ◽  
Metal Insulator Metal ◽  
Flexible Metal

Thin-Film Composite Materials as a Dielectric Layer for Flexible Metal-Insulator-Metal Capacitors

ChemSusChem ◽  
2010 ◽  
Vol 3 (9) ◽  
pp. 1051-1056 ◽  
Author(s):  
Jitendra N. Tiwari ◽  
Jagan Singh Meena ◽  
Chung-Shu Wu ◽  
Rajanish N. Tiwari ◽  
Min-Ching Chu ◽  
...  
Keyword(s):  
Thin Film ◽  
Composite Materials ◽  
Dielectric Layer ◽  
Metal Insulator ◽  
Film Composite ◽  
Thin Film Composite ◽  
Metal Insulator Metal ◽  
Flexible Metal

The role of carbon contamination in voltage linearity and leakage current in high-k metal-insulator-metal capacitors

2008 ◽  
Vol 104 (5) ◽  
pp. 054510 ◽  
Author(s):  
Bing Miao ◽  
Rajat Mahapatra ◽  
Nick Wright ◽  
Alton Horsfall
Keyword(s):  
Leakage Current ◽  
Metal Insulator ◽  
Carbon Contamination ◽  
High K ◽  
Metal Insulator Metal

Experimental Study of 1/f1+α Noise in Transient Leakage Current of Metal–Insulator–Metal With Stacked High-k Polycrystalline Films

2020 ◽  
Vol 67 (6) ◽  
pp. 2503-2509
Author(s):  
Hsin-Jyun Lin ◽  
Koji Akiyama ◽  
Yoshihiro Hirota ◽  
Yasushi Akasaka ◽  
Genji Nakamura ◽  
...  
Keyword(s):  
Experimental Study ◽  
Leakage Current ◽  
Polycrystalline Films ◽  
Metal Insulator ◽  
High K ◽  
Metal Insulator Metal
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