Flexible metal–insulator–metal capacitor using plasma enhanced binary hafnium–zirconium–oxide as gate dielectric layer
2010 ◽
Vol 50
(5)
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pp. 652-656
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2014 ◽
Vol 61
(8)
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pp. 2619-2627
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Keyword(s):
2011 ◽
Vol 29
(1)
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pp. 01AC09
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Keyword(s):
2002 ◽
Vol 2
(3)
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pp. 245-248
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Keyword(s):
2012 ◽
Vol 27
(10)
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pp. 105001
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Keyword(s):
2013 ◽
Vol 28
(5)
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pp. 055002
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