Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
2012 ◽
Vol 98
◽
pp. 275-278
◽
1994 ◽
Vol 43
(485)
◽
pp. 203-209
◽
Keyword(s):
1978 ◽
Vol 36
(1)
◽
pp. 524-525
2002 ◽
Vol 110
(2)
◽
pp. 192-194
Keyword(s):