Nanofabrication of hard X-ray optics by metal electroplating in a dry etched mechanically stable inorganic template

Gianluca Grenci; Alessandro Pozzato; Alessandro Carpentiero; Enrico Sovernigo; Massimo Tormen

doi:10.1016/j.mee.2011.02.007

Nanofabrication of hard X-ray optics by metal electroplating in a dry etched mechanically stable inorganic template

Microelectronic Engineering ◽

10.1016/j.mee.2011.02.007 ◽

2011 ◽

Vol 88 (8) ◽

pp. 2552-2555 ◽

Cited By ~ 6

Author(s):

Gianluca Grenci ◽

Alessandro Pozzato ◽

Alessandro Carpentiero ◽

Enrico Sovernigo ◽

Massimo Tormen

Keyword(s):

Ray Optics ◽

X Ray ◽

Inorganic Template

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X-ray microprobe for materials science

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100168013 ◽

1994 ◽

Vol 52 ◽

pp. 56-57

Author(s):

G.E. Ice

Keyword(s):

Crystallographic Orientation ◽

Local Structure ◽

Materials Science ◽

Chemical Information ◽

X Ray Diffraction ◽

Ray Optics ◽

X Ray ◽

Novel Materials ◽

New Information ◽

Elemental Sensitivity

The increasing availability of synchrotron x-ray sources has stimulated the development of advanced hard x-ray (E≥5 keV) microprobes. With new x-ray optics these microprobes can achieve micron and submicron spatial resolutions. The inherent elemental and crystallographic sensitivity of an x-ray microprobe and its inherently nondestructive and penetrating nature will have important applications to materials science. For example, x-ray fluorescent microanalysis of materials can reveal elemental distributions with greater sensitivity than alternative nondestructive probes. In materials, segregation and nonuniform distributions are the rule rather than the exception. Common interfaces to whichsegregation occurs are surfaces, grain and precipitate boundaries, dislocations, and surfaces formed by defects such as vacancy and interstitial configurations. In addition to chemical information, an x-ray diffraction microprobe can reveal the local structure of a material by detecting its phase, crystallographic orientation and strain.Demonstration experiments have already exploited the penetrating nature of an x-ray microprobe and its inherent elemental sensitivity to provide new information about elemental distributions in novel materials.

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