Adsorbed layer etching of fused silica by excimer laser with nanometer depth precision

2005 ◽  
Vol 78-79 ◽  
pp. 324-330 ◽  
Author(s):  
K. Zimmer ◽  
R. Böhme ◽  
B. Rauschenbach
Keyword(s):  
Excimer Laser ◽  
Adsorbed Layer ◽  
Fused Silica

Application Study on Fused Silica Prisms in Excimer Laser Spectrum Control

2013 ◽  
Vol 40 (4) ◽  
pp. 0402008
Author(s):  
单耀莹 Shan Yaoying ◽  
赵江山 Zhao Jiangshan ◽  
李慧 Li Hui ◽  
王倩 Wang Qian ◽  
沙鹏飞 Sha Pengfei ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Application Study ◽  
Laser Spectrum ◽  
Spectrum Control

Dependence of the damage and transmission properties of fused silica fibers on the excimer laser wavelength

1988 ◽  
Vol 27 (15) ◽  
pp. 3124 ◽  
Author(s):  
Rod S. Taylor ◽  
Kurt E. Leopold ◽  
Robert K. Brimacombe ◽  
Stephen Mihailov
Keyword(s):  
Excimer Laser ◽  
Laser Wavelength ◽  
Fused Silica ◽  
Transmission Properties ◽  
Silica Fibers

Laser-induced front side etching of fused silica with XeF excimer laser using thin metal layers

2012 ◽  
Vol 258 (23) ◽  
pp. 9138-9142 ◽  
Author(s):  
Pierre Lorenz ◽  
Martin Ehrhardt ◽  
Anja Wehrmann ◽  
Klaus Zimmer
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Thin Metal ◽  
Front Side ◽  
Metal Layers

Excimer laser ablation of (001) textured ZnO waveguiding films on fused silica

1997 ◽  
Vol 195 (1) ◽  
pp. 179-182
Author(s):  
W. S. Hu ◽  
Z. G. Liu ◽  
X. L. Guo ◽  
J. Sun ◽  
S. B. Xiong ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Excimer Laser ◽  
Fused Silica ◽  
Excimer Laser Ablation

ArF-excimer-laser-induced emission and absorption bands in fused silica synthesized under oxidizing conditions

1992 ◽  
Vol 45 (5) ◽  
pp. 2050-2054 ◽  
Author(s):  
Nobu Kuzuu ◽  
Yoshikazu Komatsu ◽  
Masataka Murahara
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Absorption Bands ◽  
Arf Excimer Laser

The Development of Excimer Laser Technology – History and Future Prospects

2001 ◽  
Vol 215 (12) ◽  
Author(s):  
D. Basting ◽  
U. Stamm
Keyword(s):  
Excimer Laser ◽  
Fused Silica ◽  
Pulsed Power ◽  
Excimer Lasers ◽  
Laser Technology ◽  
Research Areas ◽  
Technological Developments ◽  
Laser Development ◽  
Application Requirements ◽  
User Friendly

With focus on commercial aspects the paper reviews the historical development and various technological achievements in the field of excimer lasers since their discovery in 1970. The first commercial excimer laser model in the world, the EMG 500 from Lambda Physik was operating at maximum repetition rates of only 20 Hz, whereas today multi kHz excimer lasers as the NovaLine industrial lasers are available. In 2000, Lambda Physik introduced the most powerful commercial excimer laser, the Lambda Steel with 300 W output power having extremely high stability.In the more than 30 years of excimer lasers their properties have been studied in a multitude of research laboratories at universities, institutes, national laboratories, and industry. In the attempts to reach parameters in the UV never seen before, energies ranging from mJ to kJ, pulse durations from sub μs down to fs, spectral bandwidths from fractions of 1 nm down to less then 0.1 pm, and beam divergence from 10 mrad down to 10 μrad could be demonstrated at the various excimer lasers wavelengts. Over the years various technological achievements like the NovaTube laser chamber technology, the NovaPowerSwitch pulsed power modules and the HaloSafe fluorine and chlorine generators could be made which make the use of excimer lasers simple and user friendly. Recently, the development of DuraTube technology gave a strong push towards the development of high power 157 nm laser technology for microlithography and laser based micro-machining of “difficult” materials as fused silica or teflon.The paper describes important steps and quantum leaps in developing and improving excimer lasers. Since a large part of excimer laser development was driven by application requirements some applications developed over the years are touched as well – including early photochemistry and dye laser pumping in F. P. Schäfers laboratories. Finally, currently ongoing and for the future expected technological developments are discussed which will strengthen the position of excimer lasers as user friendly work horses in many industrial and research areas.

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