A study of silicon oxynitride film prepared by ion beam assisted deposition

2004 ◽  
Vol 58 (17-18) ◽  
pp. 2261-2265 ◽  
Author(s):  
Y WANG
Keyword(s):  
Ion Beam ◽  
Silicon Oxynitride ◽  
Ion Beam Assisted Deposition ◽  
Oxynitride Film

Plasmonic properties of titanium nitride thin films prepared by ion beam assisted deposition

2016 ◽  
Vol 185 ◽  
pp. 295-298 ◽  
Author(s):  
Lin-Ao Zhang ◽  
Hao-Nan Liu ◽  
Xiao-Xia Suo ◽  
Shuo Tong ◽  
Ying-Lan Li ◽  
...  
Keyword(s):  
Thin Films ◽  
Titanium Nitride ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Fundamental Aspects of Ion Beam Assisted Deposition of Magnesium Oxide Template Films

2009 ◽  
Vol 19 (3) ◽  
pp. 3311-3314 ◽  
Author(s):  
J.R. Groves ◽  
R.F. DePaula ◽  
L. Stan ◽  
R.H. Hammond ◽  
B.M. Clemens
Keyword(s):  
Magnesium Oxide ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

2005 ◽  
Vol 492 (1-2) ◽  
pp. 203-206 ◽  
Author(s):  
Zhi Yan ◽  
Zhi Tang Song ◽  
Wei Li Liu ◽  
Qing Wan ◽  
Fu Min Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Ion Beam ◽  
Optical And Electrical Properties ◽  
Oxide Thin Films ◽  
Ion Beam Assisted Deposition ◽  
P Type

Ion-beam assisted deposition of coating interlayers for the joining of Be/CuCrZr

2010 ◽  
Vol 85 (7-9) ◽  
pp. 1689-1692 ◽  
Author(s):  
Yang-Il Jung ◽  
Jung-Suk Lee ◽  
Jeong-Yong Park ◽  
Byoung-Kwon Choi ◽  
Yong-Hwan Jeong ◽  
...  
Keyword(s):  
Ion Beam ◽  
Ion Beam Assisted Deposition

A low energy ion beam assisted deposition technique for realizing iso-type SiGe/Si hetero-interface diodes

1996 ◽  
Vol 283 (1-2) ◽  
pp. 182-187
Author(s):  
S Mohajerzadeh ◽  
C.R Selvakumar ◽  
D.E Brodie ◽  
M.D Robertson ◽  
J.M Corbett
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Deposition Technique ◽  
Ion Beam Assisted Deposition

Plasma and ion-beam-assisted deposition of multilayers for tribological and corrosion protection

1993 ◽  
Vol 60 (1-3) ◽  
pp. 561-565 ◽  
Author(s):  
R. Hübler ◽  
A. Schröer ◽  
W. Ensinger ◽  
G.K. Wolf ◽  
W.H. Schreiner ◽  
...  
Keyword(s):  
Corrosion Protection ◽  
Ion Beam ◽  
Ion Beam Assisted Deposition

Properties of WNxfilms and WNx/GaAs Schottky diodes prepared by ion beam assisted deposition technique

1990 ◽  
Vol 67 (2) ◽  
pp. 1134-1136 ◽  
Author(s):  
J. S. Lee ◽  
C. S. Park ◽  
J. W. Yang ◽  
J. Y. Kang ◽  
D. S. Ma
Keyword(s):  
Ion Beam ◽  
Schottky Diodes ◽  
Deposition Technique ◽  
Ion Beam Assisted Deposition
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