scholarly journals Characterization of three-dimensional microstructures in single-crystal diamond

2006 ◽  
Vol 15 (10) ◽  
pp. 1614-1621 ◽  
Author(s):  
P. Olivero ◽  
S. Rubanov ◽  
P. Reichart ◽  
B.C. Gibson ◽  
S.T. Huntington ◽  
...  
Keyword(s):  
Single Crystal ◽  
Three Dimensional ◽  
Single Crystal Diamond

scholarly journals Fabrication and electrical characterization of three-dimensional graphitic microchannels in single crystal diamond

2012 ◽  
Vol 14 (5) ◽  
pp. 053011 ◽  
Author(s):  
F Picollo ◽  
D Gatto Monticone ◽  
P Olivero ◽  
B A Fairchild ◽  
S Rubanov ◽  
...  
Keyword(s):  
Single Crystal ◽  
Three Dimensional ◽  
Electrical Characterization ◽  
Single Crystal Diamond

scholarly journals Reflection/transmission confocal microscopy characterization of single-crystal diamond microlens arrays

2004 ◽  
Vol 84 (15) ◽  
pp. 2754-2756 ◽  
Author(s):  
E. Gu ◽  
H. W. Choi ◽  
C. Liu ◽  
C. Griffin ◽  
J. M. Girkin ◽  
...  
Keyword(s):  
Confocal Microscopy ◽  
Single Crystal ◽  
Microlens Arrays ◽  
Single Crystal Diamond ◽  
Microscopy Characterization

scholarly journals Characterization of a single crystal diamond pixel detector in a high energy particle beam

2008 ◽  
Vol 3 (12) ◽  
pp. P12002-P12002 ◽  
Author(s):  
M Mathes ◽  
M Cristinziani ◽  
H Kagan ◽  
S Smith ◽  
W Trischuk ◽  
...  
Keyword(s):  
Single Crystal ◽  
Particle Beam ◽  
High Energy ◽  
High Energy Particle ◽  
Pixel Detector ◽  
Energy Particle ◽  
Single Crystal Diamond

scholarly journals Fabrication and Characterization of Single-Crystal Diamond Membranes for Quantum Photonics with Tunable Microcavities

Micromachines ◽  
2020 ◽  
Vol 11 (12) ◽  
pp. 1080
Author(s):  
Julia Heupel ◽  
Maximilian Pallmann ◽  
Jonathan Körber ◽  
Rolf Merz ◽  
Michael Kopnarski ◽  
...  
Keyword(s):  
Surface Roughness ◽  
Single Crystal ◽  
Membrane Thickness ◽  
Initial Surface ◽  
Crucial Component ◽  
Single Crystal Diamond ◽  
Fabrication And Characterization ◽  
Etching Parameters ◽  
Quantum Photonics

The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl2 + O2 dry etching steps. By a variation of etching parameters regarding the Ar/Cl2 step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface.

Characterization of single-crystal diamond grown from the vapor phase on substrates of natural diamond

2011 ◽  
Vol 45 (3) ◽  
pp. 392-396 ◽  
Author(s):  
A. A. Altukhov ◽  
A. L. Vikharev ◽  
A. M. Gorbachev ◽  
M. P. Dukhnovsky ◽  
V. E. Zemlyakov ◽  
...  
Keyword(s):  
Single Crystal ◽  
Vapor Phase ◽  
Natural Diamond ◽  
Single Crystal Diamond

Removal and characterization of focused-ion-beam-induced damaged layer on single crystal diamond surface and application to multiple depth patterning

2016 ◽  
Vol 70 ◽  
pp. 159-166 ◽  
Author(s):  
Noritaka Kawasegi ◽  
Seiya Kuroda ◽  
Noboru Morita ◽  
Kazuhito Nishimura ◽  
Makoto Yamaguchi ◽  
...  
Keyword(s):  
Single Crystal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Diamond Surface ◽  
Single Crystal Diamond

Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties

2000 ◽  
Vol 657 ◽  
Author(s):  
A. V. Sumant ◽  
O. Auciello ◽  
A. R. Krauss ◽  
D. M. Gruen ◽  
D. Ersoy ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Single Crystal ◽  
Microwave Plasma ◽  
National Laboratory ◽  
Argonne National Laboratory ◽  
Coarse Grained ◽  
Mems Devices ◽  
Ultrananocrystalline Diamond ◽  
Single Crystal Diamond

ABSTRACTThe mechanical, thermal, chemical, and tribological properties of diamond make it an ideal material for the fabrication of MEMS components. However, conventional CVD diamond deposition methods result in either a coarse-grained pure diamond structure that prevents high- resolution patterning, or in a fine-grained diamond film with a significant amount of intergranular non-diamond carbon. At Argonne National Laboratory, we are able to produce phase-pure ultrananocrystalline diamond (UNCD) films for the fabrication of MEMS components. UNCD is grown by microwave plasma CVD using C60-Ar or CH4-Ar plasmas, resulting in films that have 3-5 nm grain size, are 10-20 times smoother than conventionally grown diamond films, and can have mechanical properties similar to that of single crystal diamond. We used lithographic patterning, lift-off, and etching, in conjunction with the capability for growing UNCD on SiO2 to fabricate 2-D and 3-D UNCD-MEMS structures. We have performed initial characterization of mechanical properties by using nanoindentation and in-situ TEM indentor techniques. The values of Hardness (∼88 GPa) and Young's modulus (∼ 864 GPa) measured are very close to those of single crystal diamond (100 GPa and 1000 GPa respectively). The results show that UNCD is a promising material for future high performance MEMS devices.

Characterization of Crystallographically Etched Single Crystal Diamond Diffraction Gratings

2018 ◽  
Author(s):  
Marcell Kiss ◽  
Teodoro Graziosi ◽  
Adrien Toros ◽  
Toralf Scharf ◽  
Olivier J.F. Martin ◽  
...  
Keyword(s):  
Single Crystal ◽  
Diffraction Gratings ◽  
Single Crystal Diamond
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