Electric field involved transport at elevated temperature in nanocrystalline silicon carbide nitride (nc-SiCN) thin films for harsh environment applications

2018 ◽  
Vol 18 (2) ◽  
pp. 220-225 ◽  
Author(s):  
Narendra Singh ◽  
Kirandeep Singh ◽  
Davinder Kaur
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Elevated Temperature ◽  
Electric Field ◽  
Nanocrystalline Silicon ◽  
Harsh Environment ◽  
Nanocrystalline Silicon Carbide ◽  
Sicn Thin Films

scholarly journals The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films

2015 ◽  
Vol 3 (6) ◽  
pp. 1172-1176 ◽  
Author(s):  
Hoang-Phuong Phan ◽  
Dzung Viet Dao ◽  
Li Wang ◽  
Toan Dinh ◽  
Nam-Trung Nguyen ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Electrical Conductance ◽  
Nanocrystalline Silicon ◽  
Harsh Environments ◽  
Gauge Factor ◽  
Mems Sensors ◽  
Piezoresistive Effect ◽  
Nanocrystalline Silicon Carbide ◽  
P Type

A significant piezoresistive effect in p-type nanocrystalline SiC with a gauge factor of 14.5 was reported. This result indicates that p-type nanocrystalline SiC is a good candidate for MEMS sensors used in harsh environments and bio applications.

scholarly journals Ozone Sensitive Properties of Thin Films of Nanocrystalline Silicon Carbide

2020 ◽  
Vol 12 (5) ◽  
pp. 05016-1-05016-4
Author(s):  
A. V. Semenov ◽  
◽  
D. V. Lubov ◽  
M. V. Makhonin ◽  
◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Nanocrystalline Silicon ◽  
Nanocrystalline Silicon Carbide
Sign in / Sign up

Export Citation Format

Share Document