The effect of strain on the electrical conductance of p-type nanocrystalline silicon carbide thin films
2015 ◽
Vol 3
(6)
◽
pp. 1172-1176
◽
Keyword(s):
A significant piezoresistive effect in p-type nanocrystalline SiC with a gauge factor of 14.5 was reported. This result indicates that p-type nanocrystalline SiC is a good candidate for MEMS sensors used in harsh environments and bio applications.
2007 ◽
Vol 46
(4A)
◽
pp. 1415-1426
◽
Keyword(s):
Keyword(s):
2018 ◽
Vol 4
(1)
◽
2020 ◽
Vol 12
(5)
◽
pp. 05016-1-05016-4
Keyword(s):