scholarly journals High-density assembly of nanocrystalline silicon quantum dots

2006 ◽  
Vol 6 (3) ◽  
pp. 344-347 ◽  
Author(s):  
A. Tanaka ◽  
G. Yamahata ◽  
Y. Tsuchiya ◽  
K. Usami ◽  
H. Mizuta ◽  
...  
2007 ◽  
Vol 46 (7A) ◽  
pp. 4386-4389 ◽  
Author(s):  
Yoshiyuki Kawata ◽  
Mohammed A. H. Khalafalla ◽  
Kouichi Usami ◽  
Yoshishige Tsuchiya ◽  
Hiroshi Mizuta ◽  
...  

2010 ◽  
Vol 49 (12) ◽  
pp. 125002 ◽  
Author(s):  
Tetsuya Ishikawa ◽  
Hiroki Nikaido ◽  
Koichi Usami ◽  
Ken Uchida ◽  
Shunri Oda

2001 ◽  
Vol 664 ◽  
Author(s):  
Kenta Arai ◽  
Junichi Omachi ◽  
Katsuhiko Nishiguchi ◽  
Shunri Oda

ABSTRACTWe have studied photoluminescence (PL) of surface oxidized nanocrystalline silicon quantum dots (QDs) for various oxidation periods and temperatures. With increasing oxidation period, the surface oxide grows and the Si QD core shrinks initially, then retardation of the oxidation process occurs which is ascribed to compressive stress at the interface between Si QD core and oxide. Upon oxidation, the PL spectrum peak shifts toward the shorter wavelength side followed by retardation of the blueshift or even manifestation of the redshift. The origin of PL is due to the localized excitons at the interface between Si QD core and oxide or amorphous SiOx (a-SiOx) formed at the interface. The blueshift is associated with the increased quantum con.nement or increased bandgap of a-SiOx. The redshift is due to the stress e.ect of the bandgap of Si QD core or a-SiOx. We have successfully confirmed the effect of compressive stress associated with the self-limiting oxidation by PL measurement.


2002 ◽  
Vol 737 ◽  
Author(s):  
Christopher C. Striemer ◽  
Rishikesh Krishnan ◽  
Qianghua Xie ◽  
Leonid Tsybeskov ◽  
Philippe M. Fauchet

ABSTRACTWe report a successful unification of standard lithographic approaches (top down), anisotropic etching of atomically smooth surfaces, and controlled crystallization of silicon quantum dots (bottom up) to produce silicon nanoclusters at desired locations. These results complement our previous demonstration of silicon nanocrystal uniformity in size, shape, and crystalline orientation in nanocrystalline silicon (nc-Si)/SiO2 superlattices, and could lead to practical applications of silicon nanocrystals in electronic devices. The goal of this study was to induce silicon nanocrystal nucleation at specific lateral sites in a continuous amorphous silicon (a-Si) film. Nearly all previous studies of silicon nanocrystals are based on films containing isolated nanocrystals with random lateral position and spacing. The ability to define precise two-dimensional arrays of quantum dots would allow each quantum dot to be contacted using standard photolithographic techniques, leading to practical device applications like high-density memories. In this work, a template substrate consisting of an array of pyramid-shaped holes in a (100) silicon wafer was formed using standard microfabrication techniques. The geometry of this substrate then influenced the crystallization of an a-Si/SiO2 superlattice that was deposited on it, resulting in preferential nucleation of silicon nanoclusters near the bottom of the pyramid holes. These clusters are clearly visible in transmission electron microscopy (TEM) images, while no clusters have been observed on the planar surface areas of the template. Possible explanations for this selective nucleation and future device structures will be discussed.


2009 ◽  
Author(s):  
Weiping Zhao ◽  
Jinxiang Deng ◽  
Bing Yang ◽  
Zhenrui Yu ◽  
Mariano Aceves

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