Core/shell structured sSiO2/mSiO2 composite particles: The effect of the core size on oxide chemical mechanical polishing
2018 ◽
Vol 29
(1)
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pp. 18-26
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Keyword(s):
2017 ◽
Vol 10
(05)
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pp. 1750056
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2011 ◽
Vol 258
(3)
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pp. 1217-1224
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2019 ◽
Vol 9
(17)
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pp. 4668-4677
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2019 ◽
Vol 484
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pp. 534-541
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Keyword(s):
Keyword(s):
2015 ◽
Vol 25
(6)
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pp. 1407-1413
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