Preparation of monodisperse polystyrene/silica core–shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper
2011 ◽
Vol 258
(3)
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pp. 1217-1224
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Keyword(s):
2019 ◽
Vol 484
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pp. 534-541
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Keyword(s):
2009 ◽
Vol 9
(12)
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Keyword(s):
2015 ◽
Vol 25
(6)
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pp. 1407-1413
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2018 ◽
Vol 28
(4)
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pp. 1655-1663
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Keyword(s):
2018 ◽
Vol 29
(1)
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pp. 18-26
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Keyword(s):
2019 ◽
Vol 563
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pp. 022048