Modeling study on the surface morphology evolution during removing the optics surface/subsurface damage using atmospheric pressure plasma processing

2016 ◽  
Vol 382 ◽  
pp. 260-267 ◽  
Author(s):  
Qiang Xin ◽  
Xing Su ◽  
Bo Wang
Keyword(s):  
Surface Morphology ◽  
Atmospheric Pressure ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Subsurface Damage ◽  
Morphology Evolution ◽  
Pressure Plasma ◽  
Surface Morphology Evolution ◽  
Modeling Study

Study on Atmospheric Pressure Plasma Processing of Fused Silica

2013 ◽  
Vol 706-708 ◽  
pp. 270-273
Author(s):  
Dong Fang Wang
Keyword(s):  
Atmospheric Pressure ◽  
Material Removal ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Input Power ◽  
Fused Silica ◽  
Subsurface Damage ◽  
Key Factors ◽  
Workpiece Surface ◽  
Pressure Plasma

In order to get ultra-smooth surface without subsurface damage efficiently for fused silica, the atmospheric pressure plasma processing (APPP) is developed. It is based on chemical reaction between active radicals excited by plasma and workpiece surface atoms, so the subsurface damage caused by contact stress can be avoided and atomic-level precision machining can be achieved. In this paper, the influence on material removal function by the key factors of APPP including the flow rate of reaction gases, input power, and processing distance are discussed. In addition, by the regression model a quantitative mathematical model of the material removal function of the atmospheric pressure plasma processing on fused silica is established. And this model is verified by experimental data.

Research on atmospheric pressure plasma processing sewage

2013 ◽  
Author(s):  
Gui-cai Song ◽  
Yan-xiang Na ◽  
Xiao-long Dong ◽  
Xiao-liang Sun
Keyword(s):  
Atmospheric Pressure ◽  
Plasma Processing ◽  
Atmospheric Pressure Plasma ◽  
Pressure Plasma

Experimental and Modeling Study of the Stability of the Atmospheric Pressure Plasma Jet

2007 ◽  
Author(s):  
Alexandre V. Chirokov ◽  
Shailesh P. Gangoli ◽  
Alexander A. Fridman ◽  
Alexander. F. Gutsol ◽  
Alexander Dolgopolsky ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Plasma Jet ◽  
Atmospheric Pressure Plasma Jet ◽  
Pressure Plasma ◽  
The Stability ◽  
Modeling Study
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