Laser-assisted atom probe tomography of 15N-enriched nitride thin films for analysis of nitrogen distribution in silicon-based structure

2015 ◽  
Vol 349 ◽  
pp. 89-92 ◽  
Author(s):  
Teruyuki Kinno ◽  
Katsuyuki Kitamoto ◽  
Shiro Takeno ◽  
Mitsuhiro Tomita
Keyword(s):  
Thin Films ◽  
Atom Probe Tomography ◽  
Atom Probe ◽  
Nitrogen Distribution ◽  
Silicon Based

Interdiffusion in as-deposited Ni/Ti multilayer thin films analyzed by atom probe tomography

2019 ◽  
Vol 236 ◽  
pp. 92-95 ◽  
Author(s):  
Hisham Aboulfadl ◽  
Fabian Seifried ◽  
Michael Stüber ◽  
Frank Mücklich
Keyword(s):  
Thin Films ◽  
Atom Probe Tomography ◽  
Atom Probe ◽  
Multilayer Thin Films

Spinodal decomposition of Ti0.33Al0.67N thin films studied by atom probe tomography

2012 ◽  
Vol 520 (13) ◽  
pp. 4362-4368 ◽  
Author(s):  
L.J.S. Johnson ◽  
M. Thuvander ◽  
K. Stiller ◽  
M. Odén ◽  
L. Hultman
Keyword(s):  
Thin Films ◽  
Spinodal Decomposition ◽  
Atom Probe Tomography ◽  
Atom Probe

Atom probe tomography study of GaMnN thin films

2012 ◽  
Vol 9 (3-4) ◽  
pp. 723-726
Author(s):  
Robert Nicholas ◽  
David Diercks ◽  
Matthew Kane
Keyword(s):  
Thin Films ◽  
Atom Probe Tomography ◽  
Atom Probe

Direct examination of Si atoms spatial distribution and clustering in GaAs thin films with atom probe tomography

2018 ◽  
Vol 153 ◽  
pp. 109-113
Author(s):  
Georges Beainy ◽  
Reynald Alcotte ◽  
Franck Bassani ◽  
Mickaël Martin ◽  
Adeline Grenier ◽  
...  
Keyword(s):  
Thin Films ◽  
Spatial Distribution ◽  
Atom Probe Tomography ◽  
Atom Probe ◽  
Direct Examination

scholarly journals Application of Atom Probe Tomography to Atomic Layer Deposited Thin Films

2013 ◽  
Vol 19 (S2) ◽  
pp. 1028-1029
Author(s):  
A.D. Giddings ◽  
T.J. Prosa ◽  
T.F. Kelly ◽  
D.J. Larson
Keyword(s):  
Thin Films ◽  
Atom Probe Tomography ◽  
Atomic Layer ◽  
Atom Probe

Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

scholarly journals Evidence of Superparamagnetic Co Clusters in Pulsed Laser Deposition-Grown Zn0.9Co0.1O Thin Films Using Atom Probe Tomography

2011 ◽  
Vol 133 (5) ◽  
pp. 1451-1458 ◽  
Author(s):  
Rodrigue Lardé ◽  
Etienne Talbot ◽  
Philippe Pareige ◽  
Herrade Bieber ◽  
Guy Schmerber ◽  
...  
Keyword(s):  
Thin Films ◽  
Pulsed Laser Deposition ◽  
Atom Probe Tomography ◽  
Pulsed Laser ◽  
Atom Probe ◽  
Laser Deposition

scholarly journals Correlating Interfacial Structure and Magnetism in Fe-MgO Thin Films Using Electron Microscopy, Neutron Reflectometry, and Atom Probe Tomography

2010 ◽  
Vol 16 (S2) ◽  
pp. 1526-1527
Author(s):  
SR Spurgeon ◽  
CR Winkler ◽  
BJ Kirby ◽  
CL Johnson ◽  
DN Seidman ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Atom Probe Tomography ◽  
Atom Probe ◽  
Neutron Reflectometry ◽  
Interfacial Structure

Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

scholarly journals Depth Analysis of Ta/NiFe/Ta/CoFeB/Ta/NiFe Multilayer Thin Films: Comparison of Atom Probe Tomography and Auger Electron Spectroscopy

2014 ◽  
Vol 20 (3) ◽  
pp. 207-210
Author(s):  
Masaki Kubota ◽  
Yoichi Ishida ◽  
Katsuaki Yanagiuchi ◽  
Hisashi Takamizawa ◽  
Yasuko Nozawa ◽  
...  
Keyword(s):  
Thin Films ◽  
Auger Electron Spectroscopy ◽  
Atom Probe Tomography ◽  
Electron Spectroscopy ◽  
Auger Electron ◽  
Atom Probe ◽  
Multilayer Thin Films ◽  
Depth Analysis
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