Improving the laser damage resistance of oxide thin films and multilayers via tailoring ion beam sputtering parameters

2015 ◽  
Vol 336 ◽  
pp. 34-38 ◽  
Author(s):  
M.B. Cosar ◽  
A.E.S. Ozhan ◽  
G.H. Aydogdu
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Laser Damage ◽  
Ion Beam Sputtering ◽  
Oxide Thin Films ◽  
Damage Resistance ◽  
Beam Sputtering

Energy Band Properties of Hafnium Oxide Thin Films Fabricated by Ion Beam Sputtering Technique

2017 ◽  
Vol 37 (2) ◽  
pp. 0231001
Author(s):  
刘华松 Liu Huasong ◽  
王利栓 Wang Lishuan ◽  
杨 霄 Yang Xiao ◽  
刘丹丹 Liu Dandan ◽  
姜承慧 Jiang Chenghui ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Band ◽  
Hafnium Oxide ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Oxide Thin Films ◽  
Beam Sputtering

Yttrium oxide thin films, Y2O3, grown by ion beam sputtering on Si

2000 ◽  
Vol 33 (22) ◽  
pp. 2884-2889 ◽  
Author(s):  
R J Gaboriaud ◽  
F Pailloux ◽  
P Guerin ◽  
F Paumier
Keyword(s):  
Thin Films ◽  
Yttrium Oxide ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Oxide Thin Films ◽  
Beam Sputtering

Laser damage resistance of hafnia thin films deposited by electron beam deposition, reactive low voltage ion plating, and dual ion beam sputtering

2007 ◽  
Vol 47 (13) ◽  
pp. C107 ◽  
Author(s):  
Laurent Gallais ◽  
Jérémie Capoulade ◽  
Jean-Yves Natoli ◽  
Mireille Commandré ◽  
Michel Cathelinaud ◽  
...  
Keyword(s):  
Low Voltage ◽  
Ion Beam ◽  
Laser Damage ◽  
Ion Beam Sputtering ◽  
Damage Resistance ◽  
Ion Plating ◽  
Electron Beam Deposition ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering ◽  
Beam Deposition

Aluminum doped zinc oxide thin films deposited by ion beam sputtering

1989 ◽  
Vol 96 (2) ◽  
pp. 363-368 ◽  
Author(s):  
M. Ruth ◽  
J. Tuttle ◽  
J. Goral ◽  
R. Noufi
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Oxide Thin Films ◽  
Beam Sputtering ◽  
Aluminum Doped Zinc Oxide

Preparation of Tantalum Oxide thin films on Si substrate by ion beam sputtering

1994 ◽  
pp. 435-438
Author(s):  
Yoshihiko SUZUKI ◽  
Hidekazu HASHIMA ◽  
Kouji INOUE ◽  
Souichi OGAWA ◽  
Sadao NAKAJIMA
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Tantalum Oxide ◽  
Ion Beam Sputtering ◽  
Si Substrate ◽  
Oxide Thin Films ◽  
Beam Sputtering
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