Room temperature growth and properties of ZnO films by pulsed laser deposition

2010 ◽  
Vol 257 (4) ◽  
pp. 1310-1313 ◽  
Author(s):  
Xiangli Ma ◽  
Jun Zhang ◽  
Jianguo Lu ◽  
Zhizhen Ye
Keyword(s):  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Films ◽  
Temperature Growth

Room Temperature Growth of Epitaxial Titanium Nitride Films by Pulsed Laser Deposition

2017 ◽  
Vol 17 (12) ◽  
pp. 6634-6640 ◽  
Author(s):  
Daniel Rasic ◽  
Ritesh Sachan ◽  
Matthew F. Chisholm ◽  
John Prater ◽  
Jagdish Narayan
Keyword(s):  
Titanium Nitride ◽  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Temperature Growth

Low-temperature growth of epitaxial ZnO films on (001) sapphire by ultraviolet- assisted pulsed laser deposition

1999 ◽  
Vol 69 (7) ◽  
pp. S531-S533 ◽  
Author(s):  
V. Craciun ◽  
J. Perriere ◽  
N. Bassim ◽  
R.K. Singh ◽  
D. Craciun ◽  
...  
Keyword(s):  
Low Temperature ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Films ◽  
Temperature Growth ◽  
Low Temperature Growth

Pulsed Laser Deposition of Piezoelectric Films for Micro-Fluidic Applications

1998 ◽  
Vol 541 ◽  
Author(s):  
W.J. Kim ◽  
J.C. Rife ◽  
J.S. Horwitz ◽  
R.C.Y. Auyeung ◽  
D.B. Chrisey ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Single Phase ◽  
Piezoelectric Materials ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Films ◽  
Microchannel Plates ◽  
Acoustic Transducer ◽  
Substrate Temperatures

AbtractThick films of piezoelectric materials have been grown by pulsed laser deposition (PLD) for use in the development of a programmable micro-fluidic controller. ZnO and BaTiO3 (BTO) films were deposited onto various substrates, including Au/Cr coated Si, Pt/Ti coated Si, and Au/Pd coated glass microchannel plates, at substrate temperatures from room temperature to 800 °C in a background pressure of O2 from 3 to 350 mTorr. ZnO films (∼5 µm thick) were single phase and (001) oriented. BTO films, 33 µm thick, on Pt/Ti/Si were single phase and polycrystalline. To fabricate piezoelectric acoustic transducer, an array of 2 × 4 gold electrodes was deposited onto the thick BTO films through a shadow mask by PLD. The transducers were attached to a simple fluidic circuit with a 1.6 × 1.6 mm cross section and used to generate a flow velocity of 1 mm/s at an operating frequency of 50 MHz.

Room temperature growth of semipolar AlN (1$ \bar 1 $02) films on ZnO (1$ \bar 1 $02) substrates by pulsed laser deposition

2009 ◽  
Vol 3 (2-3) ◽  
pp. 58-60 ◽  
Author(s):  
Kohei Ueno ◽  
Atsushi Kobayashi ◽  
Jitsuo Ohta ◽  
Hiroshi Fujioka ◽  
Hidetaka Amanai ◽  
...  
Keyword(s):  
Pulsed Laser Deposition ◽  
Room Temperature ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Temperature Growth
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