Low-temperature growth of epitaxial ZnO films on (001) sapphire by ultraviolet- assisted pulsed laser deposition

1999 ◽  
Vol 69 (7) ◽  
pp. S531-S533 ◽  
Author(s):  
V. Craciun ◽  
J. Perriere ◽  
N. Bassim ◽  
R.K. Singh ◽  
D. Craciun ◽  
...  
Keyword(s):  
Low Temperature ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Laser Deposition ◽  
Zno Films ◽  
Temperature Growth ◽  
Low Temperature Growth

Low temperature growth of (AlGa)2O3 films by oxygen radical assisted pulsed laser deposition

CrystEngComm ◽  
2020 ◽  
Vol 22 (1) ◽  
pp. 142-146
Author(s):  
Fabi Zhang ◽  
Congyu Hu ◽  
Makoto Arita ◽  
Katsuhiko Saito ◽  
Tooru Tanaka ◽  
...  
Keyword(s):  
Low Temperature ◽  
Pulsed Laser Deposition ◽  
Pulsed Laser ◽  
Oxygen Radical ◽  
Laser Deposition ◽  
Temperature Growth ◽  
Low Temperature Growth

Low temperature growth of β-(AlGa)2O3 films has been realized by oxygen radical assisted pulsed laser deposition.

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