Chemical reaction of sputtered Cu film with PI modified by low energy reactive atomic beam

2006 ◽  
Vol 252 (16) ◽  
pp. 5877-5891 ◽  
Author(s):  
Jong-Yong Park ◽  
Yeon-Sik Jung ◽  
J. Cho ◽  
Won-Kook Choi
Keyword(s):  
Chemical Reaction ◽  
Atomic Beam ◽  
Low Energy ◽  
Cu Film

An ultra-low energy (30–200 eV) ion-atomic beam source for ion-beam-assisted deposition in ultrahigh vacuum

2011 ◽  
Vol 82 (8) ◽  
pp. 083302 ◽  
Author(s):  
Jindřich Mach ◽  
Tomáš Šamořil ◽  
Stanislav Voborný ◽  
Miroslav Kolíbal ◽  
Jakub Zlámal ◽  
...  
Keyword(s):  
Atomic Beam ◽  
Ion Beam ◽  
Ultrahigh Vacuum ◽  
Low Energy ◽  
Beam Source ◽  
Atomic Beam Source ◽  
Ion Beam Assisted Deposition

Neutral Beam Source Design and Beam Kinetic Energy Activated SiO2 Etching

1992 ◽  
Vol 279 ◽  
Author(s):  
Lee Chen ◽  
Akihisa Sekiguchi ◽  
Dragan Podlesnik
Keyword(s):  
Kinetic Energy ◽  
Chemical Reaction ◽  
Incident Energy ◽  
Beam Energy ◽  
Large Diameter ◽  
Low Energy ◽  
Neutral Beam ◽  
Beam Source ◽  
Neutral Radical ◽  
Unique Method

ABSTRACTAn unique method is used to produce a low energy nonthermalized fast neutral radical beam wliich can activate the SiO2 surface for chemical reaction at the desired incident energy. The fast neutral beam energy is continuously adjustable (2eV<Ek<200eV) and the beam flux is typically 5×1015cm−2 sec−1(∼4L). An uniform large diameter plasma is also made for the production of neutral beam covering 5”wafer and larger. Large diameter neutral beam single wafer reactor is feasible with off-the-shelf pumping technology.

A crossed-beam study of low energy Ar+ + H2O collisions: Charge transfer and chemical reaction

1981 ◽  
Vol 60 (3) ◽  
pp. 369-378 ◽  
Author(s):  
J. Glosík ◽  
B. Friedrich ◽  
Z. Herman
Keyword(s):  
Charge Transfer ◽  
Chemical Reaction ◽  
Low Energy

scholarly journals Low-energy low-divergence pulsed indium atomic beam by laser ablation

2006 ◽  
Vol 24 (1) ◽  
pp. 47-53 ◽  
Author(s):  
KAMLESH ALTI ◽  
ALIKA KHARE
Keyword(s):  
Thin Film ◽  
Laser Ablation ◽  
Atomic Beam ◽  
Second Harmonic ◽  
High Vacuum ◽  
Low Energy ◽  
Rear Side ◽  
Angular Divergence ◽  
Atomic Force ◽  
Atomic Beams

This paper reports the formation of low-energy low-divergence pulsed indium atomic beam via ablation of thin film by illumination from the rear side with second harmonic of Q-switched Nd:YAG laser under high vacuum (∼10−5Torr). Angular divergence of ablated indium atomic, reflectivity modulation of thin film due to ablation, and longitudinal atomic velocity of ablated beam were studied as a function of laser fluence. Atomic force microscope scans of the deposited multiple shots of pulsed atomic beams show the formation of “nano-hills.”

Chemical reaction versus vibrational quenching in low energy collisions of vibrationally excited OH with O

2013 ◽  
Vol 139 (19) ◽  
pp. 194305 ◽  
Author(s):  
G. B. Pradhan ◽  
J. C. Juanes-Marcos ◽  
N. Balakrishnan ◽  
Brian K. Kendrick
Keyword(s):  
Chemical Reaction ◽  
Low Energy ◽  
Vibrationally Excited

scholarly journals Controlled Kinetics of On-Surface Dehydrogenation using a Low-Energy Electron Beam

2021 ◽  
Author(s):  
Anton Makoveev ◽  
Pavel Procházka ◽  
Azin Shahsavar ◽  
Lukáš Kormoš ◽  
Tomáš Krajňák ◽  
...  
Keyword(s):  
Electron Beam ◽  
Reaction Kinetics ◽  
Chemical Reaction ◽  
Self Assembly ◽  
Reaction Rate ◽  
Low Energy ◽  
Energy Electron ◽  
Chemical Reaction Kinetics ◽  
Low Energy Electron ◽  
Kinetics Of

Abstract Self-assembly and on-surface synthesis are vital strategies used for fabricating surface-confined 1D or 2D supramolecular nanoarchitectures with atomic precision. In many systems, the resulting structure is determined by kinetics of processes involved, i.e., reaction rate, on-surface diffusion, nucleation, and growth, all of which are typically governed by temperature. However, other external factors have been only scarcely harnessed to control the on-surface chemical reaction kinetics and self-assembly. Here, we show that a low-energy electron beam can be used to steer chemical reaction kinetics and induce the growth of molecular phases unattainable by thermal annealing. The electron beam provides a well-controlled means of promoting the elementary reaction step, i.e., deprotonation of carboxyl groups. The reaction rate linearly increases with increasing electron beam energy beyond the threshold energy of 6 eV. Our results offer the novel prospect of controlling the self-assembly, enhancing the rate of reaction steps selectively, and thus altering the kinetic rate hierarchy.

scholarly journals The Effect of New Modified Fatty Acid (CY-23) Collector on Chlorite/Hematite Separation

2018 ◽  
Vol 2018 ◽  
pp. 1-6 ◽  
Author(s):  
Wenli Jiang ◽  
Yulin Zhou ◽  
Yimin Zhang
Keyword(s):  
Fatty Acid ◽  
Chemical Reaction ◽  
Chemical Bonding ◽  
Photoelectron Spectroscopy ◽  
Electron Cloud ◽  
Low Energy ◽  
Adsorption Rate ◽  
Xps Analysis ◽  
X Ray ◽  
Before And After

The flotation separation on chlorite and hematite with the new modified fatty acid collector CY-23 was studied. The investigation included both flotation and reagent adsorption tests. And all the characteristics of chlorite surface before and after the adsorption of new collector CY-23 have been studied with X-ray photoelectron spectroscopy (XPS). The flotation results showed that caustic starch (CS) could depress the flotation of hematite and chlorite and CaCl2 could activate chlorite flotation but failed on hematite when using CY-23 as collector. The adsorption rate of CY-23 on the surface of chlorite after being inhibited by CS was relatively smaller, but the amount of CY-23 adsorbed on the inhibited chlorite was greatly increased after adding activator CaCl2. The results of XPS analysis showed that the photoelectron spectroscopy peaks of Mg2p and Al2p moved towards low energy after collector CY-23 was absorbed on chlorite surface, which indicated that chemical bonding through electron cloud transfer occurred between collector CY-23 and Mg, Al ions of chlorite surface. The chemical reaction promoted the adsorption of CY-23 on chlorite surface and eventually improved the ability of CY-23 to float and collect chlorite.

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