Multilayered metal oxide thin film gas sensors obtained by conventional and RF plasma-assisted laser ablation

2006 ◽  
Vol 252 (13) ◽  
pp. 4637-4641 ◽  
Author(s):  
B. Mitu ◽  
V. Marotta ◽  
S. Orlando
Keyword(s):  
Thin Film ◽  
Laser Ablation ◽  
Metal Oxide ◽  
Gas Sensors ◽  
Oxide Thin Film ◽  
Rf Plasma ◽  
Metal Oxide Thin Film

Influence of metallic impurities on response kinetics in metal oxide thin film gas sensors

2004 ◽  
Vol 103 (1-2) ◽  
pp. 448-456 ◽  
Author(s):  
A. Šetkus ◽  
C. Baratto ◽  
E. Comini ◽  
G. Faglia ◽  
A. Galdikas ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Gas Sensors ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film ◽  
Metallic Impurities

Solution-processed metal oxide arrays using femtosecond laser ablation and annealing for thin-film transistors

2017 ◽  
Vol 5 (36) ◽  
pp. 9273-9280 ◽  
Author(s):  
Cihai Chen ◽  
Gengxu Chen ◽  
Huihuang Yang ◽  
Guocheng Zhang ◽  
Daobin Hu ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Ablation ◽  
Femtosecond Laser ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Thin Film Transistor ◽  
Femtosecond Laser Ablation ◽  
Oxide Thin Film ◽  
Metal Oxide Layer ◽  
Metal Oxide Thin Film

A femtosecond laser is proposed to pattern and anneal a metal oxide layer for simple fabrication of metal oxide thin-film transistor arrays.

Nano- and microsized metal oxide thin film gas sensors

2007 ◽  
Vol 14 (4-5) ◽  
pp. 645-651 ◽  
Author(s):  
Stefan Palzer ◽  
Emmanuel Moretton ◽  
Francisco Hernandez Ramirez ◽  
Albert Romano-Rodriguez ◽  
Jürgen Wöllenstein
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Gas Sensors ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film

Square and collinear four probe array and Hall measurements on metal oxide thin film gas sensors

1998 ◽  
Vol 53 (1-2) ◽  
pp. 69-75 ◽  
Author(s):  
G Faglia ◽  
E Comini ◽  
G Sberveglieri ◽  
R Rella ◽  
P Siciliano ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Gas Sensors ◽  
Oxide Thin Film ◽  
Hall Measurements ◽  
Metal Oxide Thin Film ◽  
Probe Array

Laser annealing of metal oxide thin film transistor

2020 ◽  
Vol 35 (12) ◽  
pp. 1211-1221
Author(s):  
Hong-long NING ◽  
◽  
Yu-xi DENG ◽  
Jian-lang HUANG ◽  
Zi-long LUO ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film
Sign in / Sign up

Export Citation Format

Share Document