Solution-processed metal oxide arrays using femtosecond laser ablation and annealing for thin-film transistors

2017 ◽  
Vol 5 (36) ◽  
pp. 9273-9280 ◽  
Author(s):  
Cihai Chen ◽  
Gengxu Chen ◽  
Huihuang Yang ◽  
Guocheng Zhang ◽  
Daobin Hu ◽  
...  
Keyword(s):  
Thin Film ◽  
Laser Ablation ◽  
Femtosecond Laser ◽  
Metal Oxide ◽  
Thin Film Transistors ◽  
Thin Film Transistor ◽  
Femtosecond Laser Ablation ◽  
Oxide Thin Film ◽  
Metal Oxide Layer ◽  
Metal Oxide Thin Film

A femtosecond laser is proposed to pattern and anneal a metal oxide layer for simple fabrication of metal oxide thin-film transistor arrays.

Laser annealing of metal oxide thin film transistor

2020 ◽  
Vol 35 (12) ◽  
pp. 1211-1221
Author(s):  
Hong-long NING ◽  
◽  
Yu-xi DENG ◽  
Jian-lang HUANG ◽  
Zi-long LUO ◽  
...  
Keyword(s):  
Thin Film ◽  
Metal Oxide ◽  
Laser Annealing ◽  
Thin Film Transistor ◽  
Oxide Thin Film ◽  
Metal Oxide Thin Film
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