Laser-induced plasma-assisted ablation of fused quartz using the fourth harmonic of a Nd + :YAG laser

1998 ◽  
Vol 67 (5) ◽  
pp. 545-549 ◽  
Author(s):  
J. Zhang ◽  
K. Sugioka ◽  
K. Midorikawa
Keyword(s):  
Yag Laser ◽  
Laser Induced Plasma ◽  
Fourth Harmonic ◽  
Fused Quartz

Optical diagnostics in laser-induced plasma-assisted ablation of fused quartz

2000 ◽  
Author(s):  
Minghui Hong ◽  
Koji Sugioka ◽  
Yongfeng Lu ◽  
Katsumi Midorikawa ◽  
Tow Chong Chong
Keyword(s):  
Optical Diagnostics ◽  
Laser Induced Plasma ◽  
Fused Quartz

scholarly journals Micromachining Characteristics of Silicon in Flowing Water Using Fourth-Harmonic Pulsed Nd: YAG Laser Beams

2005 ◽  
Vol 33 (7) ◽  
pp. 469-474
Author(s):  
Takaharu KURODA ◽  
Takehiro WATANABE ◽  
Souta MATSUSAKA
Keyword(s):  
Laser Beams ◽  
Flowing Water ◽  
Yag Laser ◽  
Fourth Harmonic

Corneal incisions produced with the fourth harmonic (266 nm) of the YAG laser

1985 ◽  
Vol 5 (4) ◽  
pp. 371-375 ◽  
Author(s):  
Michael W. Berns ◽  
Ronald N. Gaster
Keyword(s):  
Yag Laser ◽  
Fourth Harmonic ◽  
Corneal Incisions

scholarly journals Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 nm KrF Excimer Laser

2019 ◽  
Vol 9 (24) ◽  
pp. 5320 ◽  
Author(s):  
Yu Zhao ◽  
Qian Li ◽  
Zhengfei Wang ◽  
Ziruo Dai ◽  
Tao Chen
Keyword(s):  
Excimer Laser ◽  
Quartz Substrate ◽  
Direct Interaction ◽  
Absorption Enhancement ◽  
Bottom Surface ◽  
Metal Target ◽  
Laser Induced Plasma ◽  
Plasma Ablation ◽  
Fused Quartz ◽  
Krf Excimer Laser

Laser-induced plasma ablation (LIPA) using a 248 nm KrF excimer laser was investigated for microchannel fabrication. Examination of the morphology in relation to ablation performance was emphasized, and a synthetic LIPA mechanism model was proposed based on the results. Backside LIPA with a metal target on the bottom can be attributed to a combination of two phenomena: laser-induced plasma vaporization thermal ablation from the metal target below and enhanced laser–glass direct interaction from the plasma residuum. The laser absorption enhancement of quartz substrate resulting from the metal residuum was validated clearly using absorption spectrum measurements. The influence of laser parameters on the etching quality during LIPA was also analyzed for processing optimization. Finally, fused quartz glass microchannels of outstanding surface quality and dimension uniformity were implemented. The channel depth was 28 μm, and the bottom surface roughness was better than several hundred nanometers.

Parametric Study of Ablation Depths for Different Optical Glasses Using High Fluence Laser Induced Plasma Assisted Ablation (LIPAA)

2010 ◽  
Vol 442 ◽  
pp. 172-177 ◽  
Author(s):  
A.H. Hamdani ◽  
W. Ahmed ◽  
A. Ansar ◽  
R. Akhter ◽  
W.A. Farooq ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Parametric Study ◽  
Target Material ◽  
Ablation Rate ◽  
Ablation Depth ◽  
High Fluence ◽  
Etching Depth ◽  
Laser Induced Plasma ◽  
Optical Glasses ◽  
Fused Quartz

A 40W Nd:YAG laser has been used to carry out parametric study the etching depth (ablation depth) for different optical glasses using stainless steel, brass and silver as target materials by Laser Induced Plasma Assisted Ablation (LIPAA) process. A maximum ablation depth of 38m for fused quartz has been achieved with stainless steel as target material with a high ablation rate of 565nm/pulse. A surface roughness of 120nm has been measured for fused quartz with stainless steel as target.

Film analysis employing subtarget effect using 355 nm Nd-YAG laser-induced plasma at low pressure

2006 ◽  
Vol 61 (12) ◽  
pp. 1285-1293 ◽  
Author(s):  
Rinda Hedwig ◽  
Wahyu Setia Budi ◽  
Syahrun Nur Abdulmadjid ◽  
Marincan Pardede ◽  
Maria Margaretha Suliyanti ◽  
...  
Keyword(s):  
Low Pressure ◽  
Film Analysis ◽  
Yag Laser ◽  
Laser Induced Plasma

Synthesis ofBaTiO3Thin Films Substituted with Hafnium and Zirconium by a Laser Ablation Method Using the Fourth-harmonic Wave of a YAG Laser

1997 ◽  
Vol 36 (Part 1, No. 9B) ◽  
pp. 5834-5839 ◽  
Author(s):  
Yoichiro Masuda ◽  
Shigetaka Fujita ◽  
Akira Baba ◽  
Hiroshi Masumoto ◽  
Kunihiro Nagata ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Harmonic Wave ◽  
Yag Laser ◽  
Fourth Harmonic ◽  
Laser Ablation Method
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