Optical diagnostics in laser-induced plasma-assisted ablation of fused quartz

2000 ◽  
Author(s):  
Minghui Hong ◽  
Koji Sugioka ◽  
Yongfeng Lu ◽  
Katsumi Midorikawa ◽  
Tow Chong Chong
Keyword(s):  
Optical Diagnostics ◽  
Laser Induced Plasma ◽  
Fused Quartz

scholarly journals Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 nm KrF Excimer Laser

2019 ◽  
Vol 9 (24) ◽  
pp. 5320 ◽  
Author(s):  
Yu Zhao ◽  
Qian Li ◽  
Zhengfei Wang ◽  
Ziruo Dai ◽  
Tao Chen
Keyword(s):  
Excimer Laser ◽  
Quartz Substrate ◽  
Direct Interaction ◽  
Absorption Enhancement ◽  
Bottom Surface ◽  
Metal Target ◽  
Laser Induced Plasma ◽  
Plasma Ablation ◽  
Fused Quartz ◽  
Krf Excimer Laser

Laser-induced plasma ablation (LIPA) using a 248 nm KrF excimer laser was investigated for microchannel fabrication. Examination of the morphology in relation to ablation performance was emphasized, and a synthetic LIPA mechanism model was proposed based on the results. Backside LIPA with a metal target on the bottom can be attributed to a combination of two phenomena: laser-induced plasma vaporization thermal ablation from the metal target below and enhanced laser–glass direct interaction from the plasma residuum. The laser absorption enhancement of quartz substrate resulting from the metal residuum was validated clearly using absorption spectrum measurements. The influence of laser parameters on the etching quality during LIPA was also analyzed for processing optimization. Finally, fused quartz glass microchannels of outstanding surface quality and dimension uniformity were implemented. The channel depth was 28 μm, and the bottom surface roughness was better than several hundred nanometers.

Parametric Study of Ablation Depths for Different Optical Glasses Using High Fluence Laser Induced Plasma Assisted Ablation (LIPAA)

2010 ◽  
Vol 442 ◽  
pp. 172-177 ◽  
Author(s):  
A.H. Hamdani ◽  
W. Ahmed ◽  
A. Ansar ◽  
R. Akhter ◽  
W.A. Farooq ◽  
...  
Keyword(s):  
Stainless Steel ◽  
Parametric Study ◽  
Target Material ◽  
Ablation Rate ◽  
Ablation Depth ◽  
High Fluence ◽  
Etching Depth ◽  
Laser Induced Plasma ◽  
Optical Glasses ◽  
Fused Quartz

A 40W Nd:YAG laser has been used to carry out parametric study the etching depth (ablation depth) for different optical glasses using stainless steel, brass and silver as target materials by Laser Induced Plasma Assisted Ablation (LIPAA) process. A maximum ablation depth of 38m for fused quartz has been achieved with stainless steel as target material with a high ablation rate of 565nm/pulse. A surface roughness of 120nm has been measured for fused quartz with stainless steel as target.

scholarly journals Comprehensive optical diagnostics of laser-induced plasma objects

2016 ◽  
Vol 666 ◽  
pp. 012016
Author(s):  
V K Goncharov ◽  
K V Kozadaev ◽  
H P Mikitchuk ◽  
A G Novikau
Keyword(s):  
Optical Diagnostics ◽  
Laser Induced Plasma

scholarly journals Experimental study of the stabilization mechanism of a lifted Diesel-type flame using combined optical diagnostics and laser-induced plasma ignition

2018 ◽  
Vol 197 ◽  
pp. 215-226 ◽  
Author(s):  
Fabien Tagliante ◽  
Louis-Marie Malbec ◽  
Gilles Bruneaux ◽  
Lyle M. Pickett ◽  
Christian Angelberger
Keyword(s):  
Experimental Study ◽  
Optical Diagnostics ◽  
Stabilization Mechanism ◽  
Laser Induced Plasma ◽  
Plasma Ignition
Sign in / Sign up

Export Citation Format

Share Document