Micromachining Characteristics of Silicon in Flowing Water Using Fourth-Harmonic Pulsed Nd: YAG Laser Beams
2003 ◽
2005 ◽
Vol 2005.1
(0)
◽
pp. 297-300
Keyword(s):
2005 ◽
Vol 2005.2
(0)
◽
pp. 799-804
1998 ◽
Vol 31
(19)
◽
pp. L67-L70
◽
1985 ◽
Vol 5
(4)
◽
pp. 371-375
◽
1997 ◽
Vol 117
(sup529)
◽
pp. 206-209
◽